The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges

2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

On the physics of a large CCP discharge

2016 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

2016 Plasma Sources Sci. Technol. 25 025020