Publications

Planar Lab-On-A-Chip Micro Mass Spectrometer with Time-of-Flight Separation

2021 - Stephan Westerdick, Bent Walther, Patrick Hermanns, Florian Fricke, Thomas Musch

34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Virtual Conference, January 25-29, 2021.

Plasma and Charged Particle Interaction with the Surfaces of a MEMS-Device, Micro-Mass Spectrometer

2020 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz

47th IEEE International Conference on Plasma Science, Singapore, December 6-10, 2020.

Basic research of electron dynamics in low pressure capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Zoltán Donkó, Aranka Derzsi, Peter Hartmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas

2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Ralf Peter Brinkmann, Sebastian Wilczek

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

The difference between electron heating and power absorption in capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles

2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes

European Microwave Conference 2020, Utrecht, Netherlands, 2020

A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal

2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Spatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2

2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

The Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas
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