Publications

Basic research of electron dynamics in low pressure capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Thomas Mussenbrock, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze

https://doi.org/10.1088/1361-6595/ab9374

Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Thomas Mussenbrock, Zoltán Donkó, Aranka Derzsi, Peter Hartmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Thomas Mussenbrock

https://doi.org/10.1063/5.0003114

Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas

2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Sebastian Wilczek

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure

2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

https://doi.org/10.1088/1361-6595/aba111

The difference between electron heating and power absorption in capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles

2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes

accepted in European Microwave Conference 2020, Utrecht, Netherlands, 2020

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

2019 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

Plasma Sources Science and Technology
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