Publications
Planar Lab-On-A-Chip Micro Mass Spectrometer with Time-of-Flight Separation
2021 - Stephan Westerdick, Bent Walther, Patrick Hermanns, Florian Fricke, Thomas Musch
34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Virtual Conference, January 25-29, 2021.Plasma and Charged Particle Interaction with the Surfaces of a MEMS-Device, Micro-Mass Spectrometer
2020 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz
47th IEEE International Conference on Plasma Science, Singapore, December 6-10, 2020.Basic research of electron dynamics in low pressure capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages
2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze
https://doi.org/10.1088/1361-6595/ab9374Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring
2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Zoltán Donkó, Aranka Derzsi, Peter Hartmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Electron dynamics in low pressure capacitively coupled radio frequency discharges
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó
https://doi.org/10.1063/5.0003114Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas
2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Ralf Peter Brinkmann, Sebastian Wilczek
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure
2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze
https://doi.org/10.1088/1361-6595/aba111The difference between electron heating and power absorption in capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles
2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes
European Microwave Conference 2020, Utrecht, Netherlands, 2020