Electron density measurements in technological plasmas using the Multipole Resonance Probe

2010 - Tim Styrnoll, Martin Lapke, Christian Schulz, Robert Storch, Jens Oberrath, Thomas Musch, Ilona Rolfes, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, Oc­to­ber 4-8, 2010