Publications
Modeling and simulation of multifrequency capacitive discharges
2010 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann
WELTPP-11 Kerkrade,The Netherlands (2008)
Page:
2010 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann
WELTPP-11 Kerkrade,The Netherlands (2008)