Publications

The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]

Analytical Model for the Microwave Driven Double ICP Plasma Jet

2012 - Ali Arshadi, Denis Eremin, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel

65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, Texas

Calculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes

2012 - Daniel Szeremley, Simon Steves, Ralf Peter Brinkmann, Peter Awakowicz, Mark J. Kushner, Thomas Mussenbrock

65th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Aus­tin (Texas), USA, 22-26 Oc­to­ber, oral contribution

The Multiple Resonance Probe: A Novel Device for Industry Compatible Plasma Diagnostics

2012 - Ralf Peter Brinkmann, Robert Storch, Martin Lapke, Jens Oberrath, Christian Schulz, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

65th Annual Gaseous Electronics Conference 2012 , Vol. 57, No. 8 , Austin, Texas, USA, Oct 22–26, 2012

Characterization of Dielectric Deposition Processes Using Active Plasma Resonance Spectroscopy

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Kleinheubacher Tagung 2012, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 24-26, 2012

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]

Film deposition on the inner surface of tubes using atmospheric-pressure Ar-CH4, Ar-C2H2 and Ar-C2H2-H-2 plasmas: interpretation of film properties from plasma-chemical kinetics

2012 - Ramasamy Pothiraja, Max Engelhardt, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 45, Issue: 33, Article Number: 335202, DOI: 10.1088/0022-3727/45/33/335202, Published: AUG 22 2012

Calculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes

2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

Dok­tor­an­den­kol­lo­qui­um 2012,IGK im Rahmen des SFB-TR 87, Bochum, Germany, 03 Au­gust, oral cont­ri­bu­ti­on

Quantitative characterization of a dielectric barrier discharge in air applying non-calibrated spectrometer, current measurement and numerical simulation

2012 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz

MEASUREMENT SCIENCE & TECHNOLOGY, Volume: 23, Issue: 8, Article Number: 085605, DOI: 10.1088/0957-0233/23/8/085605, Published: AUG 2012

Global models for the microwave driven double icp plasma jet

2012 - Ali Arshadi, Denis Eremin, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel

39th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2012, Edin­burgh, Scott­land, Juli 08-12

Numerical Simulation of a Microwave Driven Low Pressure Plasma for PET Bottle Treatment

2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

39th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2012, Edinburgh, Scottland, Juli 08-12

Prozesstaugliche Plasmadiagnostik auf Basis der Multipol-Resonanz-Sonde

2012 - Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Martin Lapke, Thomas Mussenbrock, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012, Nürnberg, 22.-23. Mai (Proceedings: ISBN 978-3-9813484-0-8)

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

2012 - Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz

PCT/DE2011/001802, R. P. Brinkmann, J. Oberrath, P. Awakowicz, M. Lapke, T. Musch, T. Mussenbrock, I. Rolfes, C. Schulz, R. Storch, T. Styrnoll, C. Zietz (Erfinder), Ruhr-Universität Bochum (Anmelder), Offenlegung 12.04.2012

Prozessüberwachung und Kontrolle mit der Multipol-Resonanz-Sonde

2012 - Ralf Peter Brinkmann, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Thomas Mussenbrock, Thomas Musch, Ilona Rolfes, Christian Zietz

DPG Früh­jahrs­ta­gung 2012, Stutt­gart, Ger­ma­ny, March 12-16

Numerische Simulation von kapazitiven Mehrfrequenzentladungen für Sputteranwendungen

2012 - Daniel Szeremley, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2012, Stuttgart, Ger­ma­ny, 12-16 March

Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties

2012 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz, H Brunken, A Ludwig

PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 21, Issue: 1, Article Number: 015010, DOI: 10.1088/0963-0252/21/1/015010, Published: FEB 2012

Temperature measurements at thoriated tungsten electrodes in a model lamp and their interpretation by numerical simulation

2011 - Andre Bergner, Michael Westermeier, Cornelia Ruhrmann, Peter Awakowicz, Jürgen Mentel

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 44, Issue: 50, Article Number: 505203, DOI: 10.1088/0022-3727/44/50/505203, Published: DEC 21 2011

Space-resolved characterization of high frequency atmospheric-pressure plasma in nitrogen, applying optical emission spectroscopy and numerical simulation

2011 - Priyadarshini Rajasekaran, Cornelia Ruhrmann, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 44, Issue: 48, Article Number: 485205, DOI: 10.1088/0022-3727/44/48/485205, Published: DEC 7 2011

Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

2011 - Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll

64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011

Active Plasma Resonance Spectroscopy Using The Multipole Resonance Probe

2011 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Kleinheubacher Tagung 2011, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 26-28, 2011
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