Publications
Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde
2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes
2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, Bochum, Germany, July 16-18, 2019Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzentladungen
2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Thomas Mussenbrock
19. Fachtagung für Plasmatechnologie PT19, Cottbus, Deutschland, Juni 17-19, 2019.Nonlinear Electron Power Absorption in Capacitively Coupled Radio Frequency Discharges
2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Zoltán Donkó, Thomas Mussenbrock
2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.Theoretical investigation of the magnetic asymmetry effect by using a lumped element model
2019 - Dennis Engel, Moritz Oberberg, Birk Berger, Laura Kroll, Julian Schulze, Peter Awakowicz, Ralf Peter Brinkmann
2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.Monitoring of Industrial Plasma Processes Using the Multipole Resonance Probe
2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
European Microwave Conference in Central Europe (EuMCE), pp. 604-607, Prague, Czech Republic, May 13-15, 2019High Frequency Plasma Enhancement of a Conventional Spark Ignition System to Extend the Operating Range of a Modern Mass-Production Engine
2018 - Kevin Stark, Sven Gröger, Marcel van Delden, Gordon Notzon, Wolfgang Eifler, Thomas Musch, Peter Awakowicz
4th International Conference on Ignition Systems for Gasoline Engines, Berlin, Germany, Dec. 2018.On understanding of a magnetically enhanced hollow cathode arc plasma
2018 - Liang Xu, Jens-Peter Heinß, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann
71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Michael Friedrichs, Alexandra Serwa, Peter Uhlig, Jens Oberrath, Peter Awakowicz, Ilona Rolfes
30th Asia-Pacific Microwave Conference (APMC), pp. 1315-1317, DOI: 10.23919/APMC.2018.8617552, Kyoto, Japan, November 06–09, 2018 [IEEE Library]Eine temperaturbeständige Sonde für die Plasmadiagnostik in LTCC
2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz
IMAPS-Herbstkonferenz 2018, München, Deutschland, October 18–19, 2018Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018 [IEEE Library]A Temperature Stable Probe for Plasma Diagnostics in LTCC
2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz
IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes
2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz
DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018Neural network based linearization and control of sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017Control-oriented modeling and stabilization of reactive sputter processes
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas
2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen
2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements
2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Sputtering process data interpreted by heavy particle simulations
2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017