Publications
Basic research of electron dynamics in low pressure capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages
2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze
https://doi.org/10.1088/1361-6595/ab9374Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring
2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Zoltán Donkó, Aranka Derzsi, Peter Hartmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Electron dynamics in low pressure capacitively coupled radio frequency discharges
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó
https://doi.org/10.1063/5.0003114Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas
2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Ralf Peter Brinkmann, Sebastian Wilczek
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure
2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze
https://doi.org/10.1088/1361-6595/aba111The difference between electron heating and power absorption in capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles
2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes
accepted in European Microwave Conference 2020, Utrecht, Netherlands, 2020The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes
2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
2019 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze
Plasma Sources Science and TechnologyA potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal
2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasSpatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2
2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasThe Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas
2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasVoltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches
2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze
Plasma Sources Science and Technology, Volume 28, Number 7Near Cathode Modeling of a Hollow Cathode Arc in an Axial Magnetic Field
2019 - Liang Xu, Jens-Peter Heinß, Ilija Stefanovic, Denis Eremin, Fred Fietzke, Peter Awakowicz, Ralf Peter Brinkmann
5th WOPMAS, 5th-6th December, 2019, Bochum, GermanyUntersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde
2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes
2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, DOI: 10.1109/IMWS-AMP.2019.8880124, Bochum, Germany, July 16-18, 2019 [IEEE Library]Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzentladungen
2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó
19. Fachtagung für Plasmatechnologie PT19, Cottbus, Deutschland, Juni 17-19, 2019.Nonlinear Electron Power Absorption in Capacitively Coupled Radio Frequency Discharges
2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Zoltán Donkó
2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.Power Gain and Loss Dynamics of γ- and δ- electrons in Low Pressure CCRF Discharges
2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek
9th bi-annual Radio Frequency Workshop, Dublin, Ireland, June 24-25 2019