Publications

Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde

2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019

Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes

2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, Bochum, Germany, July 16-18, 2019

Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzentladungen

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Thomas Mussenbrock

19. Fachtagung für Plasmatechnologie PT19, Cottbus, Deutschland, Juni 17-19, 2019.

Nonlinear Electron Power Absorption in Capacitively Coupled Radio Frequency Discharges

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Zoltán Donkó, Thomas Mussenbrock

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

Theoretical investigation of the magnetic asymmetry effect by using a lumped element model

2019 - Dennis Engel, Moritz Oberberg, Birk Berger, Laura Kroll, Julian Schulze, Peter Awakowicz, Ralf Peter Brinkmann

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

Monitoring of Industrial Plasma Processes Using the Multipole Resonance Probe

2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

European Microwave Conference in Central Europe (EuMCE), pp. 604-607, Prague, Czech Republic, May 13-15, 2019
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