Publications
Disparity between current and voltage driven capacitively coupled radio frequency discharges
2018 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Donkó, Zoltán, Ralf Peter Brinkmann
Plasma Sources Science and Technology, Accepted Manuscript online 2 October 2018 https://doi.org/10.1088/1361-6595/aae5c1Multi frequency matching for voltage waveform tailoring
2018 - Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, David M French, Jan Trieschmann
Plasma Sources Science and Technology, Volume 27, Number 9 http://iopscience.iop.org/article/10.1088/1361-6595/aad2cdProgression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018 [IEEE Library]Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation
2018 - Julian Schulze, Zoltán Donkó, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann
Plasma Sources Science and Technology, Volume 27, Number 5 http://iopscience.iop.org/article/10.1088/1361-6595/aabebc/metaA Temperature Stable Probe for Plasma Diagnostics in LTCC
2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz
IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes
2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz
DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018Neural network based linearization and control of sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017Control-oriented modeling and stabilization of reactive sputter processes
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas
2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017