Publications

Disparity between current and voltage driven capacitively coupled radio frequency discharges

2018 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Donkó, Zoltán, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Accepted Manuscript online 2 October 2018 https://doi.org/10.1088/1361-6595/aae5c1

Multi frequency matching for voltage waveform tailoring

2018 - Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, David M French, Jan Trieschmann

Plas­ma Sour­ces Sci­ence and Tech­no­lo­gy, Vo­lu­me 27, Num­ber 9 http://iopscience.iop.org/article/10.1088/1361-6595/aad2cd

Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018 [IEEE Library]

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

2018 - Julian Schulze, Zoltán Donkó, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Volume 27, Number 5 http://iopscience.iop.org/article/10.1088/1361-6595/aabebc/meta

A Temperature Stable Probe for Plasma Diagnostics in LTCC

2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz

IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018

An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]

The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes

2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz

DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018

Neural network based linearization and control of sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017

Control-oriented modeling and stabilization of reactive sputter processes

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017

The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas

2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko

70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017
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