Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017

Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs

2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017

A global model of cylindrical and coaxial surface-wave discharges

2017 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

J. Phys. D: Appl. Phys. 50 245203, 2017 [JPhysD:Appl Phys]

Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes

2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch

2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765

From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems

2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)

Efficient model for active control of radio frequency magnetron sputtering

2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

18. Fach­ta­gung für Plas­ma­tech­no­lo­gie, Göt­tin­gen, Ger­ma­ny, Fe­bru­ary 20-22, 2017

Tissue differentiation by means of high resolution optical emission spectroscopy during electrosurgical intervention

2017 - Buerger, Ines, Scharpf, Marcus, Hennenlotter, Joerg, Nuessle, Daniela, Spether, Dominik, Neugebauer, Alexander, Nikita Bibinov, Stenzl, Arnulf, Fend, Falko, Enderle, Markus, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 3 Article Number: 035401 DOI: 10.1088/1361-6463/aa4ed3 Published: JAN 25 2017 [URL]

The effect of UV radiation from oxygen and argon plasma on the adhesion of organosilicon coatings on polypropylene

2017 - Jaritz, M, Behm, H, Hopmann, Ch, Kirchheim, D, Felix Mitschker, Peter Awakowicz, Dahlmann, R

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 1 Article Number: 015201 DOI: 10.1088/1361-6463/50/1/015201 Published: JAN 11 2017 [URL]

Silicon surface modifications produced by non-equilibrium He, Ne and Kr plasma jets

2017 - Max Engelhardt, Kartaschew, Konstantin, Nikita Bibinov, Havenith, Martina, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 1 Article Number: 015206 DOI: 10.1088/1361-6463/50/1/015206 Published: JAN 11 2017 [URL]

VUV absorption spectroscopy of bacterial spores and DNA components

2017 - Marcel Fiebrandt, Jan Lackmann, Raguse, Marina, Moeller, Ralf, Peter Awakowicz, Katharina Stapelmann

PLASMA PHYSICS AND CONTROLLED FUSION Volume: 59 Issue: 1 Special Issue: SI Article Number: 014010 DOI: 10.1088/0741-3335/59/1/014010 Published: JAN 2017 [URL]