Publications

Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017

Robust high-gain control of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017

The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

2017 - Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

2017 Plasma Sources Sci. Technol. 26 085006 [Link]

Model reduction and identification of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017

Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017

Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs

2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017

A global model of cylindrical and coaxial surface-wave discharges

2017 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

J. Phys. D: Appl. Phys. 50 245203, 2017 [JPhysD:Appl Phys]

Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes

2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch

2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765

From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems

2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)

Efficient model for active control of radio frequency magnetron sputtering

2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

18. Fach­ta­gung für Plas­ma­tech­no­lo­gie, Göt­tin­gen, Ger­ma­ny, Fe­bru­ary 20-22, 2017
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