Publications
The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes
2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
2019 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze
Plasma Sources Science and TechnologyA potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal
2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasSpatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2
2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasThe Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas
2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasVoltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches
2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze
Plasma Sources Science and Technology, Volume 28, Number 7Near Cathode Modeling of a Hollow Cathode Arc in an Axial Magnetic Field
2019 - Liang Xu, Jens-Peter Heinß, Ilija Stefanovic, Denis Eremin, Fred Fietzke, Peter Awakowicz, Ralf Peter Brinkmann
5th WOPMAS, 5th-6th December, 2019, Bochum, GermanyHysteresis and E-mode to H-mode transition in a MEMS-device, low-pressure, microwave-driven microplasma
2019 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz
Annual Gaseous Electronics Conference 2019, College Station, Texas, USA, October 28 - November 1, 2019.Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde
2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes
2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, DOI: 10.1109/IMWS-AMP.2019.8880124, Bochum, Germany, July 16-18, 2019 [IEEE Library]