Publications
Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018 [IEEE Library]A Temperature Stable Probe for Plasma Diagnostics in LTCC
2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz
IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes
2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz
DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018Neural network based linearization and control of sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017Control-oriented modeling and stabilization of reactive sputter processes
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas
2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen
2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements
2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Sputtering process data interpreted by heavy particle simulations
2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017