Publications
The application of the multipole resonance probe to industrially relevant processes
2017 - Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges
2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017Model identification of nonlinear sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze: Model identification of nonlinear sputter processes Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017.Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik
2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2017, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 25-27, 2017Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017Robust high-gain control of nonlinear reactive sputter processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas
2017 - Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze
2017 Plasma Sources Sci. Technol. 26 085006 [Link]Model reduction and identification of nonlinear reactive sputter processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs
2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze
invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017A global model of cylindrical and coaxial surface-wave discharges
2017 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann
J. Phys. D: Appl. Phys. 50 245203, 2017 [JPhysD:Appl Phys]Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes
2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch
2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems
2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock
18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)Efficient model for active control of radio frequency magnetron sputtering
2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann
18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017Tissue differentiation by means of high resolution optical emission spectroscopy during electrosurgical intervention
2017 - Buerger, Ines, Scharpf, Marcus, Hennenlotter, Joerg, Nuessle, Daniela, Spether, Dominik, Neugebauer, Alexander, Nikita Bibinov, Stenzl, Arnulf, Fend, Falko, Enderle, Markus, Peter Awakowicz
JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 3 Article Number: 035401 DOI: 10.1088/1361-6463/aa4ed3 Published: JAN 25 2017 [URL]The effect of UV radiation from oxygen and argon plasma on the adhesion of organosilicon coatings on polypropylene
2017 - Jaritz, M, Behm, H, Hopmann, Ch, Kirchheim, D, Felix Mitschker, Peter Awakowicz, Dahlmann, R
JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 1 Article Number: 015201 DOI: 10.1088/1361-6463/50/1/015201 Published: JAN 11 2017 [URL]Silicon surface modifications produced by non-equilibrium He, Ne and Kr plasma jets
2017 - Max Engelhardt, Kartaschew, Konstantin, Nikita Bibinov, Havenith, Martina, Peter Awakowicz
JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 1 Article Number: 015206 DOI: 10.1088/1361-6463/50/1/015206 Published: JAN 11 2017 [URL]VUV absorption spectroscopy of bacterial spores and DNA components
2017 - Marcel Fiebrandt, Jan Lackmann, Raguse, Marina, Moeller, Ralf, Peter Awakowicz, Katharina Stapelmann
PLASMA PHYSICS AND CONTROLLED FUSION Volume: 59 Issue: 1 Special Issue: SI Article Number: 014010 DOI: 10.1088/0741-3335/59/1/014010 Published: JAN 2017 [URL]Global model for active control of capacitive radio frequency magnetron discharges
2016 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input
2016 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 14, 2016