Publications
Neural network based linearization and control of sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017Control-oriented modeling and stabilization of reactive sputter processes
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas
2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen
2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements
2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Sputtering process data interpreted by heavy particle simulations
2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017The application of the multipole resonance probe to industrially relevant processes
2017 - Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges
2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017Model identification of nonlinear sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze: Model identification of nonlinear sputter processes Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017.Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik
2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2017, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 25-27, 2017