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Vorträge & Konferenzbeiträge
2021
Pohle, D., Mitschker, F., Jenderny, J., Rudolph, M., Schulz, C., Awakowicz, P., & Rolfes, I. (2021). A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles. 2020 50th European Microwave Conference (EuMC), 479–482. https://doi.org/10.23919/EuMC48046.2021.9338200
2019
Hopmann, C., Wilski, S., Wipperfuerth, J., Mitschker, F., Awakowicz, P., & Dahlmann, R. (2019). Influence of adjacent defects on the permeability of plasmapolymer coated plastics. 070001. https://doi.org/10.1063/1.5121667
Pohle, D., Schulz, C., Oberberg, M., Awakowicz, P., & Rolfes, I. (2019). Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes. 2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP), 163–165. https://doi.org/10.1109/IMWS-AMP.2019.8880124
Woelfel, C., Oberberg, M., Awakowicz, P., & Lunze, J. (2019). Plasma State Control of Reactive Sputter Processes. International Conference of Control, Dynamic Systems, and Robotics. https://doi.org/10.11159/cdsr19.107
2018
Pohle, D., Schulz, C., Rolfes, I., Oberberg, M., Awakowicz, P., Serwa, A., & Uhlig, P. (2018). An advanced high-temperature stable multipole resonance probe for industry compatible plasma diagnostics. 2018 11th German Microwave Conference (GeMiC), 235–238. https://doi.org/10.23919/GEMIC.2018.8335073
Pohle, D., Schulz, C., Oberberg, M., Friedrichs, M., Serwa, A., Uhlig, P., Oberrath, J., Awakowicz, P., & Rolfes, I. (2018). A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring. 2018 Asia-Pacific Microwave Conference (APMC), 1315–1317. https://doi.org/10.23919/APMC.2018.8617552
Pohle, D., Schulz, C., Oberberg, M., Serwa, A., Uhlig, P., Awakowicz, P., & Rolfes, I. (2018). Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology. 2018 48th European Microwave Conference (EuMC), 239–242. https://doi.org/10.23919/EuMC.2018.8541730
2017
Mallach, M., Oberberg, M., Awakowicz, P., & Musch, T. (2017). Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes. 2017 IEEE MTT-S International Microwave Symposium (IMS), 1022–1025. https://doi.org/10.1109/MWSYM.2017.8058765
Groger, S., Hamme, M., Iglesias, E., & Awakowicz, P. (2017). Characterization of Spark Discharges at High Pressure Conditions by Spectral Line Broadening. 2017 IEEE International Conference on Plasma Science (ICOPS), 1–1. https://doi.org/10.1109/PLASMA.2017.8496160
Woelfel, C., Awakowicz, P., & Lunze, J. (2017). Tuning rule for linear control of nonlinear reactive sputter processes. 2017 21st International Conference on Process Control (PC), 109–114. https://doi.org/10.1109/PC.2017.7976198
Woelfel, C., Awakowicz, P., & Lunze, J. (2017). Robust high-gain control of nonlinear reactive sputter processes. 2017 IEEE Conference on Control Technology and Applications (CCTA), 25–30. https://doi.org/10.1109/CCTA.2017.8062435
Woelfel, C., Kockmann, S., Awakowicz, P., & Lunze, J. (2017). Neural network based linearization and control of sputter processes. 2017 11th Asian Control Conference (ASCC), 2831–2836. https://doi.org/10.1109/ASCC.2017.8287626
Woelfel, C., Kockmann, S., Awakowicz, P., & Lunze, J. (2017). Model identification of nonlinear sputter processes. 2017 17th International Conference on Control, Automation and Systems (ICCAS), 182–187. https://doi.org/10.23919/ICCAS.2017.8204438
Hermanns, P., Hillebrand, B., Fiebrandt, M., & Awakowicz, P. (2017). Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy. 2017 IEEE International Conference on Plasma Science (ICOPS), 1–1. https://doi.org/10.1109/PLASMA.2017.8496165
Foest, R., Wauer, J., Stenzel, O., Wilbrandt, S., Franke, C., Oberberg, M., Harhausen, J., & Brinkmann, R. P. (2017). Prospects for the enhancement of PIAD processes by plasma diagnostics. In J. L. Bentley & S. Stoebenau (Eds.), Optifab 2017 (p. 69). SPIE. https://doi.org/10.1117/12.2279800
2016
Schulz, C., Rolfes, I., Oberberg, M., & Awakowicz, P. (2016). Collision frequency determination of low-pressure plasmas based on RF-reflectometry. 2016 46th European Microwave Conference (EuMC), 807–810. https://doi.org/10.1109/EuMC.2016.7824466
Groger, S., & Awakowicz, P. (2016). Characterization of a spark discharge of spark plugs by spectral line broadening. 2016 IEEE International Conference on Plasma Science (ICOPS), 1–1. https://doi.org/10.1109/PLASMA.2016.7534133
Szeremley, D., Mussenbrock, T., Brinkmann, R. P., Eremin, D., Mitschker, F., Steves, S., Awakowicz, P., & Kushner, M. (2016). Numerical simulations of a microwave driven low pressure plasma. 2016 IEEE International Conference on Plasma Science (ICOPS), 1–1. https://doi.org/10.1109/PLASMA.2016.7534377
Runkel, J., Schulz, C., Rolfes, I., Oberberg, M., & Awakowicz, P. (2016). Monitoring of low pressure plasmas with a calibrated probe. 2016 German Microwave Conference (GeMiC), 43–46. https://doi.org/10.1109/GEMIC.2016.7461551
Oberberg, M., Ries, S., Bibinov, N., & Awakowicz, P. (2016). Measurements of electron density in different low pressure plasmas using the multipole resonance probe, langmuir probe and optical emission spectroscopy. 2016 IEEE International Conference on Plasma Science (ICOPS), 1–1. https://doi.org/10.1109/PLASMA.2016.7534183
2013
Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., & Musch, T. (2013). The multipole resonance probe: Evolution of a plasma sensor. 2013 IEEE SENSORS, 1–4. https://doi.org/10.1109/ICSENS.2013.6688324
Schulz, C., Styrnoll, T., Awakowicz, P., & Rolfes, I. (2013). Supervision and control of medical sterilization processes utilizing the Multipole Resonance Probe. 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO), 1–3. https://doi.org/10.1109/IMWS-BIO.2013.6756158
2012
Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Lapke, M., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., & Musch, T. (2012). The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. 2012 42nd European Microwave Conference, 566–569. https://doi.org/10.23919/EuMC.2012.6459256
Schulz, C., Styrnoll, T., Lapke, M., Oberrath, J., Storch, R., Awakowicz, P., Brinkmann, R. P., Musch, T., Mussenbrock, T., & Rolfes, I. (2012). A novel radio-frequency plasma probe for monitoring systems in dielectric deposition processes. 2012 International Conference on Electromagnetics in Advanced Applications, 728–731. https://doi.org/10.1109/ICEAA.2012.6328725
2011
Stenzel, O., Wilbrandt, S., Kaiser, N., Schmitz, C., Turowski, M., Ristau, D., Awakowicz, P., Brinkmann, R. P., Musch, T., Rolfes, I., Steffen, H., Foest, R., Ohl, A., Köhler, T., Dolgonos, G., & Frauenheim, T. (2011). Plasma and optical thin film technologies (M. Lequime, H. A. Macleod, & D. Ristau, Eds.; p. 81680L). https://doi.org/10.1117/12.895323
2010
Schulz, C., Lapke, M., Oberrath, J., Storch, R., Styrmoll, T., Zietz, C., Awakowicz, P., Brinkmann, R. P., Musch, T., Mussenbrock, T., & Rolfes, I. (2010). The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy. IEEE Middle East Conference on Antennas and Propagation (MECAP 2010), 1–5. https://doi.org/10.1109/MECAP.2010.5724175
