Veröffentlichungen

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Awakowicz, P., Lunze, J., & Schulze, J. (2019). The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition. Journal of Instrumentation, 14(10), P10007–P10007. https://doi.org/10.1088/1748-0221/14/10/P10007 Cite
You, K. H., Schulze, J., Derzsi, A., Donkó, Z., Yeom, H. J., Kim, J. H., Seong, D. J., & Lee, H.-C. (2019). Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges. Physics of Plasmas, 26(1), 013503. https://doi.org/10.1063/1.5063543 Cite
Derzsi, A., Horváth, B., Donkó, Z., & Schulze, J. (2020). Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms. Plasma Sources Science and Technology, 29(7), 074001. https://doi.org/10.1088/1361-6595/ab9156 Cite
Horváth, B., Derzsi, A., Schulze, J., Korolov, I., Hartmann, P., & Donkó, Z. (2020). Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon. Plasma Sources Science and Technology, 29(5), 055002. https://doi.org/10.1088/1361-6595/ab8176 Cite
Oberberg, M., Berger, B., Buschheuer, M., Engel, D., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2020). The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O 2. Plasma Sources Science and Technology, 29(7), 075013. https://doi.org/10.1088/1361-6595/ab9b31 Cite
Wilczek, S., Schulze, J., Brinkmann, R. P., Donkó, Z., Trieschmann, J., & Mussenbrock, T. (2020). Electron dynamics in low pressure capacitively coupled radio frequency discharges. Journal of Applied Physics, 127(18), 181101. https://doi.org/10.1063/5.0003114 Cite
Korolov, I., Donkó, Z., Hübner, G., Liu, Y., Mussenbrock, T., & Schulze, J. (2021). Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N 2 mixtures. Plasma Sources Science and Technology, 30(9), 095013. https://doi.org/10.1088/1361-6595/ac1c4d Cite
Korolov, I., Steuer, D., Bischoff, L., Hübner, G., Liu, Y., Schulz-von der Gathen, V., Böke, M., Mussenbrock, T., & Schulze, J. (2021). Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and O 2. Journal of Physics D: Applied Physics, 54(12), 125203. https://doi.org/10.1088/1361-6463/abd20e Cite
Masheyeva, R. U., Dzhumagulova, K. N., Myrzaly, M., Schulze, J., & Donkó, Z. (2021). Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas. AIP Advances, 11(7), 075024. https://doi.org/10.1063/5.0055444 Cite
Zhang, Q.-Z., Nguyen-Smith, R. T., Beckfeld, F., Liu, Y., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2021). Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations. Plasma Sources Science and Technology, 30(7), 075017. https://doi.org/10.1088/1361-6595/abf598 Cite
Hübner, G., Bischoff, L., Korolov, I., Donkó, Z., Leimkühler, M., Liu, Y., Böke, M., Schulz-von der Gathen, V., Mussenbrock, T., & Schulze, J. (2022). The effects of the driving frequencies on micro atmospheric pressure He/N 2 plasma jets driven by tailored voltage waveforms. Journal of Physics D: Applied Physics, 55(9), 095204. https://doi.org/10.1088/1361-6463/ac3791 Cite
Gans, T., O’Connell, D., Schulze, J., Kadetov, V. A., & Czarnetzki, U. (2006). Diagnostics for the Dynamics of Power Dissipation in Technologically used Plasmas. AIP Conference Proceedings, 876, 260–271. https://doi.org/10.1063/1.2406035 Cite
Schüngel, E., Zhang, Q.-Z., Iwashita, S., Schulze, J., Hou, L.-J., Wang, Y.-N., & Czarnetzki, U. (2011). Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect. Journal of Physics D: Applied Physics, 44(28), 285205. https://doi.org/10.1088/0022-3727/44/28/285205 Cite
Saikia, P., Bhuyan, H., Escalona, M., Favre, M., Bora, B., Kakati, M., Wyndham, E., Rawat, R. S., & Schulze, J. (2018). The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model. Journal of Applied Physics, 123(18), 183303. https://doi.org/10.1063/1.5023884 Cite
Saikia, P., Bhuyan, H., Escalona, M., Favre, M., Wyndham, E., Maze, J., & Schulze, J. (2018). Study of dual radio frequency capacitively coupled plasma: an analytical treatment matched to an experiment. Plasma Sources Science and Technology, 27(1), 015014. https://doi.org/10.1088/1361-6595/aaa565 Cite
Horváth, B., Daksha, M., Korolov, I., Derzsi, A., & Schulze, J. (2017). The role of electron induced secondary electron emission from SiO2surfaces in capacitively coupled radio frequency plasmas operated at low pressures. Plasma Sources Science and Technology, 26(12), 124001. https://doi.org/10.1088/1361-6595/aa963d Cite
Horváth, B., Schulze, J., Donkó, Z., & Derzsi, A. (2018). The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas. Journal of Physics D: Applied Physics, 51(35), 355204. https://doi.org/10.1088/1361-6463/aad47b Cite
Schüngel, E., Korolov, I., Bruneau, B., Derzsi, A., Johnson, E. V., O’Connell, D., Gans, T., Booth, J.-P., Donko, Z., & Schulze, J. (2016). Tailored voltage waveform capacitively coupled plasmas in electronegative gases : frequency dependence of asymmetry effects. Journal of Physics D: Applied Physics, 1–15. https://doi.org/10.1088/0022-3727/49/26/265203 Cite
Liu, Y.-X., Korolov, I., Schüngel, E., Wang, Y.-N., Donkó, Z., & Schulze, J. (2017). Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap. Physics of Plasmas, 24(7), 073512. https://doi.org/10.1063/1.4993603 Cite
Saikia, P., Bora, B., Schulze, J., & Bhuyan, H. (2018). Experimental study and analytical modelling of the effect of the driving frequencies on dual frequency capacitively coupled plasmas. Physics of Plasmas, 25(8), 083501. https://doi.org/10.1063/1.5032296 Cite
Liu, Y.-X., Schüngel, E., Korolov, I., Donkó, Z., Wang, Y.-N., & Schulze, J. (2016). Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas. Physical Review Letters, 116(25), 255002. https://doi.org/10.1103/PhysRevLett.116.255002 Cite
Saikia, P., Bhuyan, H., Yap, S. L., Escalona, M., Favre, M., Wyndham, E., & Schulze, J. (2019). Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas. Physics of Plasmas, 26(8), 083505. https://doi.org/10.1063/1.5094603 Cite
Ohtsu, Y., Nakashima, T., Tanaka, R., & Schulze, J. (2020). Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization. Vacuum, 181, 109593. https://doi.org/10.1016/j.vacuum.2020.109593 Cite
Schüngel, E., Donkó, Z., & Schulze, J. (2017). A Simple Model for Ion Flux-Energy Distribution Functions in Capacitively Coupled Radio-Frequency Plasmas Driven by Arbitrary Voltage Waveforms. Plasma Processes and Polymers, 14(4–5), 1600117. https://doi.org/10.1002/ppap.201600117 Cite
Liu, Y.-X., Wang, X.-Y., Zhang, Q.-Z., Donkó, Z., Zhao, K., Schulze, J., & Wang, Y.-N. (2020). Avalanche induced rapid impedance change and electron power absorption during gas breakdown under radio-frequency excitation. Plasma Sources Science and Technology, 29(12), 12LT03. https://doi.org/10.1088/1361-6595/abcc7a Cite
Preissing, P., Korolov, I., Schulze, J., Schulz-von der Gathen, V., & Böke, M. (2020). Three-dimensional density distributions of NO in the effluent of the COST reference microplasma jet operated in He/N 2 /O 2. Plasma Sources Science and Technology, 29(12), 125001. https://doi.org/10.1088/1361-6595/abbd86 Cite
Zhao, K., Su, Z.-X., Liu, J.-R., Liu, Y.-X., Zhang, Y.-R., Schulze, J., Song, Y.-H., & Wang, Y.-N. (2020). Suppression of nonlinear standing wave excitation via the electrical asymmetry effect. Plasma Sources Science and Technology, 29(12), 124001. https://doi.org/10.1088/1361-6595/abc6f7 Cite
Liu, Y., Korolov, I., Hemke, T., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O 2 : A fluid dynamics approach. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/abf370 Cite
Liu, Y., Korolov, I., Trieschmann, J., Steuer, D., Schulz-von der Gathen, V., Böke, M., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Micro atmospheric pressure plasma jets excited in He/O 2 by voltage waveform tailoring: a study based on a numerical hybrid model and experiments. Plasma Sources Science and Technology, 30(6), 064001. https://doi.org/10.1088/1361-6595/abd0e0 Cite
Liu, Y., Trieschmann, J., Berger, B., Schulze, J., & Mussenbrock, T. (2021). Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field. Physics of Plasmas, 28(5), 053505. https://doi.org/10.1063/5.0045947 Cite
Ries, S., Schroeder, M., Woestefeld, M., Corbella, C., Korolov, I., Awakowicz, P., & Schulze, J. (2021). Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas. Review of Scientific Instruments, 92(10), 103503. https://doi.org/10.1063/5.0059658 Cite
Schulenberg, D. A., Korolov, I., Donkó, Z., Derzsi, A., & Schulze, J. (2021). Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon. Plasma Sources Science and Technology, 30(10), 105003. https://doi.org/10.1088/1361-6595/ac2222 Cite
Vass, M., Derzsi, A., Schulze, J., & Donkó, Z. (2021). Intrasheath electron dynamics in low pressure capacitively coupled plasmas. Plasma Sources Science and Technology, 30(3), 03LT04. https://doi.org/10.1088/1361-6595/abe728 Cite
Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2021). Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation. Plasma Sources Science and Technology, 30(6), 065015. https://doi.org/10.1088/1361-6595/ac0486 Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas. Plasma Sources Science and Technology, 30(8), 085011. https://doi.org/10.1088/1361-6595/abf206 Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms. Plasma Sources Science and Technology, 30(5), 054001. https://doi.org/10.1088/1361-6595/abf31d Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges. J. Vac. Sci. Technol. A, 39, 063004. https://doi.org/10.1116/6.0001327 Cite
Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control, 16, 100142. https://doi.org/10.1016/j.ifacsc.2021.100142 Cite
Zhang, Q.-Z., Sun, J.-Y., Lu, W.-Q., Schulze, J., Guo, Y.-Q., & Wang, Y.-N. (2021). Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion. Physical Review E, 104(4), 045209. https://doi.org/10.1103/PhysRevE.104.045209 Cite
Ohtsu, Y., Imoto, S., Takemura, S., & Schulze, J. (2021). Characteristics of a radio frequency magnetized double-ring-shaped hollow cathode plasma source with permanent magnets for high-density hydrogen plasma generation. Vacuum, 193, 110531. https://doi.org/10.1016/j.vacuum.2021.110531 Cite
Zaka-ul-Islam, M., Oteef, M. D. Y., Tu, X., & Schulze, J. (2021). Deposition of oxygenated hydrocarbons in a packed-bed plasma reactor during the oxidation of toluene: influence of applied voltage. Journal of Physics D: Applied Physics, 54(19), 194007. https://doi.org/10.1088/1361-6463/abe332 Cite
Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2021). Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges. Plasma Sources Science and Technology, 30(10), 10LT01. https://doi.org/10.1088/1361-6595/ac287b Cite
Wang, J.-C., Tian, P., Kenney, J., Rauf, S., Korolov, I., & Schulze, J. (2021). Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation. Plasma Sources Science and Technology, 30(7), 075031. https://doi.org/10.1088/1361-6595/ac0da4 Cite
Vass, M., Wilczek, S., Schulze, J., & Donkó, Z. (2021). Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N 2. Plasma Sources Science and Technology, 30(10), 105010. https://doi.org/10.1088/1361-6595/ac278c Cite
He, Y., Preissing, P., Steuer, D., Klich, M., Schulz-von der Gathen, V., Böke, M., Korolov, I., Schulze, J., Guerra, V., Brinkmann, R. P., & Kemaneci, E. (2021). Zero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jets in binary and ternary mixtures of oxygen and nitrogen with helium background. Plasma Sources Science and Technology, 30(10), 105017. https://doi.org/10.1088/1361-6595/ac278d Cite
Ma, F.-F., Zhang, Q.-Z., Schulze, J., Sun, J.-Y., & Wang, Y.-N. (2021). Temporal evolution of plasma characteristics in synchronized dual-level RF pulsed capacitively coupled discharge. Plasma Sources Science and Technology, 30(10), 105018. https://doi.org/10.1088/1361-6595/ac2675 Cite
Steuer, D., Korolov, I., Chur, S., Schulze, J., Gathen, V. S. der, Golda, J., & Böke, M. (2021). 2D spatially resolved O atom density profiles in an atmospheric pressure plasma jet: from the active plasma volume to the effluent. Journal of Physics D: Applied Physics, 54(35), 355204. https://doi.org/10.1088/1361-6463/ac09b9 Cite
Wang, X.-Y., Liu, J.-R., Liu, Y.-X., Donkó, Z., Zhang, Q.-Z., Zhao, K., Schulze, J., & Wang, Y.-N. (2021). Comprehensive understanding of the ignition process of a pulsed capacitively coupled radio frequency discharge: the effect of power-off duration. Plasma Sources Science and Technology, 30(7), 075011. https://doi.org/10.1088/1361-6595/ac0b56 Cite
Zhang, Q.-Z., Zhang, L., Yang, D.-Z., Schulze, J., Wang, Y.-N., & Bogaerts, A. (2021). Positive and negative streamer propagation in volume dielectric barrier discharges with planar and porous electrodes. Plasma Processes and Polymers, 18(4), 2000234. https://doi.org/10.1002/ppap.202000234 Cite
Gergs, T., Borislavov, B., & Trieschmann, J. (2022). Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks. Journal of Vacuum Science & Technology B, 40(1), 012802. https://doi.org/10.1116/6.0001485 Cite
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