Modellierung und Simulation

DFG

CO₂ Plasma Jet

Regelung der Elektronendynamik in Radiofrequenz-getriebenen Mikroplasmajets für effiziente CO₂-Konversion

DFG

Hochleistungs-Sputterquellen

Schwerteilchenprozesse in Hochleistungsplasmen

DFG

IEDF Sensor

Wafer-Level Sensorstruktur zur Bestimmung von Ionenenergie- und Ionenwinkelverteilungsfunktionen in Niederdruckplasmen

DFG

Memristive Bauelemente

Modellierung und Simulation memristiver Bauelemente und Systeme

DFG

Multiskalentransport

Mehrskalen-Transportmodellierung: Von Prozessplasmen zu resistiv schaltenden Bauelementen

DFG

Nano Security

CMOS-kompatible RRAM-basierten Strukturen für die Implementierung von Physikalisch Nichtklonbarer Funktionen (PUF) und echten Zufallszahlengenerationen (TRNG)

DFG

RF Plasma Jet

Prozesskontrolle in Atmosphärendruck RF Mikroplasmajets durch Voltage Waveform Tailoring und maßgeschneiderte Oberflächen

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