DR.-ING. SE­BAS­TI­AN WIL­CZEK

Scientific Assistant

Address:
Ruhr Uni­ver­si­ty Bo­chum
Faculty of Electrical Engineering and Information Technology
Chair of Applied Electrodynamics and Plasma Technology
Uni­ver­si­taets­stra­sse 150
D-44801 Bo­chum, Germany

Room:
ID 1/130

Phone:
(+49)(0)234 / 32 – 27662

Fax:
(+49)(0)234-32-14230

E-Mail:
wilczek(at)aept.rub.de

Publications

Vass, M., Wilczek, S., Schulze, J., & Donkó, Z. (2021). Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N 2. Plasma Sources Science and Technology, 30(10), 105010. https://doi.org/10.1088/1361-6595/ac278c Cite
Donko, Z., Derzsi, A., Vass, M., Horváth, B., Wilczek, S., Hartmann, B., & Hartmann, P. (2021). eduPIC: an introductory particle based code for radio-frequency plasma simulation. Plasma Sources Science and Technology. https://doi.org/10.1088/1361-6595/ac0b55 Cite
Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2021). Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation. Plasma Sources Science and Technology, 30(6), 065015. https://doi.org/10.1088/1361-6595/ac0486 Cite
Klich, M., Wilczek, S., Janssen, J. F. J., Brinkmann, R. P., Mussenbrock, T., & Trieschmann, J. (2021). Ion dynamics in capacitively coupled argon–xenon discharges. Plasma Sources Science and Technology, 30(6), 065019. https://doi.org/10.1088/1361-6595/ac02b0 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite
Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2020). Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure. Plasma Sources Science and Technology, 29(8), 085014. https://doi.org/10.1088/1361-6595/aba111 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Journal of Applied Physics, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite
Wilczek, S., Schulze, J., Brinkmann, R. P., Donkó, Z., Trieschmann, J., & Mussenbrock, T. (2020). Electron dynamics in low pressure capacitively coupled radio frequency discharges. Journal of Applied Physics, 127(18), 181101. https://doi.org/10.1063/5.0003114 Cite
Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2020). Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas. Plasma Sources Science and Technology, 29(2), 025019. https://doi.org/10.1088/1361-6595/ab5f27 Cite
Krüger, F., Wilczek, S., Mussenbrock, T., & Schulze, J. (2019). Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches. Plasma Sources Science and Technology, 28(7), 075017. https://doi.org/10.1088/1361-6595/ab2c72 Cite
Wilczek, S., Trieschmann, J., Schulze, J., Donkó, Z., Brinkmann, R. P., & Mussenbrock, T. (2018). Disparity between current and voltage driven capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 27(12), 125010. https://doi.org/10.1088/1361-6595/aae5c1 Cite
Schulze, J., Donkó, Z., Lafleur, T., Wilczek, S., & Brinkmann, R. P. (2018). Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation. Plasma Sources Science and Technology, 27(5), 055010. https://doi.org/10.1088/1361-6595/aabebc Cite
Daksha, M., Derzsi, A., Wilczek, S., Trieschmann, J., Mussenbrock, T., Awakowicz, P., Donkó, Z., & Schulze, J. (2017). The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas. Plasma Sources Science and Technology, 26(8), 085006. https://doi.org/10.1088/1361-6595/aa7c88 Cite
Wilczek, S., Trieschmann, J., Eremin, D., Brinkmann, R. P., Schulze, J., Schuengel, E., Derzsi, A., Korolov, I., Hartmann, P., Donkó, Z., & Mussenbrock, T. (2016). Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas. Physics of Plasmas, 23(6), 063514. https://doi.org/10.1063/1.4953432 Cite
Wilczek, S., Trieschmann, J., Schulze, J., Schuengel, E., Brinkmann, R. P., Derzsi, A., Korolov, I., Donkó, Z., & Mussenbrock, T. (2015). The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges. Plasma Sources Science and Technology, 24(2), 024002. https://doi.org/10.1088/0963-0252/24/2/024002 Cite
en_GB