PD DR. Julian Schulze

Senior Scientist

Address:
Ruhr Uni­ver­si­ty Bo­chum
Faculty of Electrical Engineering and Information Technology
Chair of Electrical Engineering and Plasma Technology
Uni­ver­si­taets­stra­sse 150
D-44801 Bo­chum, Germany

Room:
ID 1/545

Phone:
(+49)(0)234 / 32 – 23482

Fax:
(+49)(0)234-32-14230

E-Mail:
schulze(at)aept.rub.de

Private Homepage:
http://fjschulze.de

ORCiD:
https://orcid.org/0000-0001-7929-5734

Google Scholar:
https://scholar.google.com/citations?user=7CYrMRAAAAAJ

Publications

Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2021). Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges. Plasma Sources Science and Technology, 30(10), 10LT01. https://doi.org/10.1088/1361-6595/ac287b Cite
Schulenberg, D. A., Korolov, I., Donkó, Z., Derzsi, A., & Schulze, J. (2021). Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon. Plasma Sources Science and Technology, 30(10), 105003. https://doi.org/10.1088/1361-6595/ac2222 Cite
Ries, S., Schroeder, M., Woestefeld, M., Corbella, C., Korolov, I., Awakowicz, P., & Schulze, J. (2021). Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas. Review of Scientific Instruments, 92(10), 103503. https://doi.org/10.1063/5.0059658 Cite
Korolov, I., Donkó, Z., Hübner, G., Liu, Y., Mussenbrock, T., & Schulze, J. (2021). Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N 2 mixtures. Plasma Sources Science and Technology, 30(9), 095013. https://doi.org/10.1088/1361-6595/ac1c4d Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas. Plasma Sources Science and Technology, 30(8), 085011. https://doi.org/10.1088/1361-6595/abf206 Cite
Masheyeva, R. U., Dzhumagulova, K. N., Myrzaly, M., Schulze, J., & Donkó, Z. (2021). Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas. AIP Advances, 11(7), 075024. https://doi.org/10.1063/5.0055444 Cite
Zhang, Q.-Z., Nguyen-Smith, R. T., Beckfeld, F., Liu, Y., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2021). Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations. Plasma Sources Science and Technology, 30(7), 075017. https://doi.org/10.1088/1361-6595/abf598 Cite
Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2021). Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation. Plasma Sources Science and Technology, 30(6), 065015. https://doi.org/10.1088/1361-6595/ac0486 Cite
Liu, Y., Korolov, I., Trieschmann, J., Steuer, D., Schulz-von der Gathen, V., Böke, M., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Micro atmospheric pressure plasma jets excited in He/O 2 by voltage waveform tailoring: a study based on a numerical hybrid model and experiments. Plasma Sources Science and Technology, 30(6), 064001. https://doi.org/10.1088/1361-6595/abd0e0 Cite
Zaka-ul-Islam, M., Oteef, M. D. Y., Tu, X., & Schulze, J. (2021). Deposition of oxygenated hydrocarbons in a packed-bed plasma reactor during the oxidation of toluene: influence of applied voltage. Journal of Physics D: Applied Physics, 54(19), 194007. https://doi.org/10.1088/1361-6463/abe332 Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms. Plasma Sources Science and Technology, 30(5), 054001. https://doi.org/10.1088/1361-6595/abf31d Cite
Liu, Y., Korolov, I., Hemke, T., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O 2 : A fluid dynamics approach. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/abf370 Cite
Korolov, I., Steuer, D., Bischoff, L., Hübner, G., Liu, Y., Schulz-von der Gathen, V., Böke, M., Mussenbrock, T., & Schulze, J. (2021). Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and O 2. Journal of Physics D: Applied Physics, 54(12), 125203. https://doi.org/10.1088/1361-6463/abd20e Cite
Vass, M., Derzsi, A., Schulze, J., & Donkó, Z. (2021). Intrasheath electron dynamics in low pressure capacitively coupled plasmas. Plasma Sources Science and Technology, 30(3), 03LT04. https://doi.org/10.1088/1361-6595/abe728 Cite
Ohtsu, Y., Imoto, S., Takemura, S., & Schulze, J. (2021). Characteristics of a radio frequency magnetized double-ring-shaped hollow cathode plasma source with permanent magnets for high-density hydrogen plasma generation. Vacuum, 193, 110531. https://doi.org/10.1016/j.vacuum.2021.110531 Cite
Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control, 16, 100142. https://doi.org/10.1016/j.ifacsc.2021.100142 Cite
Liu, Y., Trieschmann, J., Berger, B., Schulze, J., & Mussenbrock, T. (2021). Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field. Physics of Plasmas, 28(5), 053505. https://doi.org/10.1063/5.0045947 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite
Preissing, P., Korolov, I., Schulze, J., Schulz-von der Gathen, V., & Böke, M. (2020). Three-dimensional density distributions of NO in the effluent of the COST reference microplasma jet operated in He/N 2 /O 2. Plasma Sources Science and Technology, 29(12), 125001. https://doi.org/10.1088/1361-6595/abbd86 Cite
Liu, Y.-X., Wang, X.-Y., Zhang, Q.-Z., Donkó, Z., Zhao, K., Schulze, J., & Wang, Y.-N. (2020). Avalanche induced rapid impedance change and electron power absorption during gas breakdown under radio-frequency excitation. Plasma Sources Science and Technology, 29(12), 12LT03. https://doi.org/10.1088/1361-6595/abcc7a Cite
Schücke, L., Gembus, J.-L., Peters, N., Kogelheide, F., Nguyen-Smith, R. T., Gibson, A. R., Schulze, J., Muhler, M., & Awakowicz, P. (2020). Conversion of volatile organic compounds in a twin surface dielectric barrier discharge. Plasma Sources Science and Technology, 29(11), 114003. https://doi.org/10.1088/1361-6595/abae0b Cite
Wang, L., Wen, D.-Q., Hartmann, P., Donkó, Z., Derzsi, A., Wang, X.-F., Song, Y.-H., Wang, Y.-N., & Schulze, J. (2020). Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges. Plasma Sources Science and Technology, 29(10), 105004. https://doi.org/10.1088/1361-6595/abb2e7 Cite
Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2020). Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure. Plasma Sources Science and Technology, 29(8), 085014. https://doi.org/10.1088/1361-6595/aba111 Cite
Oberberg, M., Berger, B., Buschheuer, M., Engel, D., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2020). The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O 2. Plasma Sources Science and Technology, 29(7), 075013. https://doi.org/10.1088/1361-6595/ab9b31 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Journal of Applied Physics, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite
Wilczek, S., Schulze, J., Brinkmann, R. P., Donkó, Z., Trieschmann, J., & Mussenbrock, T. (2020). Electron dynamics in low pressure capacitively coupled radio frequency discharges. Journal of Applied Physics, 127(18), 181101. https://doi.org/10.1063/5.0003114 Cite
Korolov, I., Leimkühler, M., Böke, M., Donkó, Z., Schulz-von der Gathen, V., Bischoff, L., Hübner, G., Hartmann, P., Gans, T., Liu, Y., Mussenbrock, T., & Schulze, J. (2020). Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N 2. Journal of Physics D: Applied Physics, 53(18), 185201. https://doi.org/10.1088/1361-6463/ab6d97 Cite
Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2020). Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas. Plasma Sources Science and Technology, 29(2), 025019. https://doi.org/10.1088/1361-6595/ab5f27 Cite
Kogelheide, F., Offerhaus, B., Bibinov, N., Krajinski, P., Schücke, L., Schulze, J., Stapelmann, K., & Awakowicz, P. (2020). Characterisation of volume and surface dielectric barrier discharges in N 2 –O 2 mixtures using optical emission spectroscopy. Plasma Processes and Polymers, 17(6), 1900126. https://doi.org/10.1002/ppap.201900126 Cite
Banko, L., Ries, S., Grochla, D., Arghavani, M., Salomon, S., Pfetzing-Micklich, J., Kostka, A., Rogalla, D., Schulze, J., Awakowicz, P., & Ludwig, A. (2019). Effects of the Ion to Growth Flux Ratio on the Constitution and Mechanical Properties of Cr 1– x -Al x -N Thin Films. ACS Combinatorial Science, 21(12), 782–793. https://doi.org/10.1021/acscombsci.9b00123 Cite
Ries, S., Banko, L., Hans, M., Primetzhofer, D., Schneider, J. M., Ludwig, A., Awakowicz, P., & Schulze, J. (2019). Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering. Plasma Sources Science and Technology, 28(11), 114001. https://doi.org/10.1088/1361-6595/ab504b Cite
Oberberg, M., Engel, D., Berger, B., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2019). Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge. Plasma Sources Science and Technology, 28(11), 115021. https://doi.org/10.1088/1361-6595/ab53a0 Cite
Offerhaus, B., Kogelheide, F., Jalat, D., Bibinov, N., Schulze, J., Stapelmann, K., & Awakowicz, P. (2019). Determination of NO densities in a surface dielectric barrier discharge using optical emission spectroscopy. Journal of Applied Physics, 126(19), 193301. https://doi.org/10.1063/1.5094894 Cite
Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Awakowicz, P., Lunze, J., & Schulze, J. (2019). The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition. Journal of Instrumentation, 14(10), P10007–P10007. https://doi.org/10.1088/1748-0221/14/10/P10007 Cite
Brandt, S., Berger, B., Donkó, Z., Derzsi, A., Schüngel, E., Koepke, M., & Schulze, J. (2019). Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF 4. Plasma Sources Science and Technology, 28(9), 095021. https://doi.org/10.1088/1361-6595/ab3c7c Cite
Korolov, I., Donkó, Z., Hübner, G., Bischoff, L., Hartmann, P., Gans, T., Liu, Y., Mussenbrock, T., & Schulze, J. (2019). Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring. Plasma Sources Science and Technology, 28(9), 094001. https://doi.org/10.1088/1361-6595/ab38ea Cite
Ohtsu, Y., Takasaki, M., & Schulze, J. (2019). Spatial structure of radio-frequency capacitive discharge plasma with ring-shaped hollow electrode using Ar and O 2 mixture gases. Journal of Physics D: Applied Physics, 52(35), 355202. https://doi.org/10.1088/1361-6463/ab2862 Cite
Krüger, F., Wilczek, S., Mussenbrock, T., & Schulze, J. (2019). Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches. Plasma Sources Science and Technology, 28(7), 075017. https://doi.org/10.1088/1361-6595/ab2c72 Cite
Lafleur, T., Schulze, J., & Donkó, Z. (2019). Plasma-surface interactions. Plasma Sources Science and Technology, 28(4), 040201. https://doi.org/10.1088/1361-6595/ab1380 Cite
Daksha, M., Derzsi, A., Zaka-ul-Islam, M., Schulenberg, D., Berger, B., Donkó, Z., & Schulze, J. (2019). Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas. Plasma Sources Science and Technology, 28(3), 034002. https://doi.org/10.1088/1361-6595/ab094f Cite
Schmidt, F., Schulze, J., Johnson, E., Booth, J.-P., Keil, D., French, D. M., Trieschmann, J., & Mussenbrock, T. (2019). Erratum: Multi frequency matching for voltage waveform tailoring (2018 Plasma Sources Sci. Technol . 27 095012). Plasma Sources Science and Technology, 28(1), 019601. https://doi.org/10.1088/1361-6595/aaeb4b Cite
Gibson, A. R., Donkó, Z., Alelyani, L., Bischoff, L., Hübner, G., Bredin, J., Doyle, S., Korolov, I., Niemi, K., Mussenbrock, T., Hartmann, P., Dedrick, J. P., Schulze, J., Gans, T., & O’Connell, D. (2019). Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring. Plasma Sources Science and Technology, 28(1), 01LT01. https://doi.org/10.1088/1361-6595/aaf535 Cite
Bischoff, L., Hübner, G., Korolov, I., Donkó, Z., Hartmann, P., Gans, T., Held, J., Schulz-von der Gathen, V., Liu, Y., Mussenbrock, T., & Schulze, J. (2018). Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N 2 mixtures. Plasma Sources Science and Technology, 27(12), 125009. https://doi.org/10.1088/1361-6595/aaf35d Cite
Wilczek, S., Trieschmann, J., Schulze, J., Donkó, Z., Brinkmann, R. P., & Mussenbrock, T. (2018). Disparity between current and voltage driven capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 27(12), 125010. https://doi.org/10.1088/1361-6595/aae5c1 Cite
Berger, B., You, K., Lee, H.-C., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2018). Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas. Plasma Sources Science and Technology, 27(12), 12LT02. https://doi.org/10.1088/1361-6595/aaefc7 Cite
Donkó, Z., Derzsi, A., Vass, M., Schulze, J., Schuengel, E., & Hamaguchi, S. (2018). Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms. Plasma Sources Science and Technology, 27(10), 104008. https://doi.org/10.1088/1361-6595/aae5c3 Cite
Oberberg, M., Kallähn, J., Awakowicz, P., & Schulze, J. (2018). Experimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas. Plasma Sources Science and Technology, 27(10), 105018. https://doi.org/10.1088/1361-6595/aae199 Cite
Schmidt, F., Schulze, J., Johnson, E., Booth, J.-P., Keil, D., French, D. M., Trieschmann, J., & Mussenbrock, T. (2018). Multi frequency matching for voltage waveform tailoring. Plasma Sources Science and Technology, 27(9), 095012. https://doi.org/10.1088/1361-6595/aad2cd Cite
Ries, S., Bibinov, N., Rudolph, M., Schulze, J., Mráz, S., Schneider, J. M., & Awakowicz, P. (2018). Spatially resolved characterization of a dc magnetron plasma using optical emission spectroscopy. Plasma Sources Science and Technology, 27(9), 094001. https://doi.org/10.1088/1361-6595/aad6d9 Cite
Schulze, J., Donkó, Z., Lafleur, T., Wilczek, S., & Brinkmann, R. P. (2018). Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation. Plasma Sources Science and Technology, 27(5), 055010. https://doi.org/10.1088/1361-6595/aabebc Cite
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