CSC
2D Particle-in-Cell
Realistic 2D Particle-in-Cell simulations of charged particle dynamics in low pressure capacitively coupled radio frequency plasmas
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Technological High-frequency Plasmas
Priv.-Doz. Dr. Julian Schulze
BMBF
FlexTMDSense
Research on novel, flexible sensor systems based on two-dimensional material systems
DFG
Multifrequenz-CCP
In subproject C1, a novel reactor concept for reactive sputtering processes in the form of a large-area capacitively coupled multi-frequency discharge (MFCCP) is developed, characterized and optimized.
DFG
Oberflächen-DBD
From ns- to ms-pulses – influence of voltage characteristics on surface barrier discharges
DFG
Reactive sputtering processes
In this project, a capacitively coupled plasma discharge with an externally applied magnetic field is investigated.
DFG
RF Plasma Jet
Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces
DFG
Strukturierte DBD
The project aims to fundamentally understand Patterned Dielectric Barrier Discharges for environmental applications of Volatile Organic Compounds (VOCs) pollutant removal from gas streams.
