Technological High-frequency Plasmas

Priv.-Doz. Dr. Julian Schulze
CSC

2D Particle-in-Cell

Realistic 2D Particle-in-Cell simulations of charged particle dynamics in low pressure capacitively coupled radio frequency plasmas

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DFG

Multifrequenz-CCP

In subproject C1, a novel reactor concept for reactive sputtering processes in the form of a large-area capacitively coupled multi-frequency discharge (MFCCP) is developed, characterized and optimized.

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DFG

RF Plasma Jet

Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces

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DFG

Strukturierte DBD

The project aims to fundamentally understand Patterned Dielectric Barrier Discharges for environmental applications of Volatile Organic Compounds (VOCs) pollutant removal from gas streams.

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