In subproject C1, a novel reactor concept for reactive sputtering processes in the form of a large-area capacitively coupled multi-frequency discharge (MFCCP) is developed, characterized and optimized.
Plasma diagnostics of pulsed microwave plasmas with HF-bias combined with plasma-enhanced atomic layer deposition for the deposition of multilayer SiOx gradient coatings as barrier coating of flexible polymers
Project A7 of the DFG funded SFB 1316 aims at the fundamental understanding of a novel twin surface dielectric barrier discharge for the purification and sterilization of gas streams by means of plasma-assisted catalysis.
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