CSC
2D Particle-in-Cell
Realistic 2D Particle-in-Cell simulations of charged particle dynamics in low pressure capacitively coupled radio frequency plasmas
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Research
The research at AEPT and BPT is divided into four research areas, which have a large overlap in content due to the interdisciplinary nature of plasma technology.
- Materials Processing and Environmental Applications
- Biomedical Applications
- Technological High-frequency Plasmas
- Modeling and Simulation
Our research is supported to a significant extent by public funding sources. These are in detail:
- German Research Foundation (DFG)
- Federal Ministry of Education and Research (BMBF)
- German Federal Ministry for Economic Affairs and Energy (BMWi)
- Ministry of Economic Affairs, Innovation, Digitalisation and Energy of the State of North Rhine-Westphalia (MWIDE.NRW)
The lists of ongoing and already completed DFG projects can be found here:
- GEPRIS: Chair of Applied Electrodynamics and Plasma Technology
- GEPRIS: Chair of Electrical Engineering and Plasma Technology
- GEPRIS: Junior Professorship of Biomedical Plasma Technology
As part of our research, we are members of the following coordinated research initiatives of the DFG, among others:
Research Projects
DFG
CO2 Plasma Jet
Controlling the electron dynamics in radio-frequency driven micro plasma jets for efficient CO2 conversion
BMBF
FlexTMDSense
Research on novel, flexible sensor systems based on two-dimensional material systems
MWIDE.NRW
House of Plasma
With the help of the MRP, direct internal parameters can be recorded stable in real time for plasma-based surface treatments.
DFG
IEDF Sensor
Wafer-level sensor structure for measurements of the ion energy distribution function and the ion angle distribution function in low-pressure plasmas
DFG
Multifrequenz-CCP
In subproject C1, a novel reactor concept for reactive sputtering processes in the form of a large-area capacitively coupled multi-frequency discharge (MFCCP) is developed, characterized and optimized.
DFG
Multiskalentransport
Multiscale Transport Modeling: From Process Plasmas to Resistive Switching Devices
DFG
Nano Security
Physically Unclonable Functions (PUF) and True Random Number Generation (TRNG) are two components that are widely used today to generate random bit streams in security applications.
DFG
Oberflächen-DBD
From ns- to ms-pulses – influence of voltage characteristics on surface barrier discharges
PECVD-Folienbeschichtung
Transferprojekt T06 im SFB-TR 87 Wartungsarme kontinuierliche Air2Air PECVD-Folienbeschichtung durch In-Plasma Konzept (In-Plasma-Air2Air) In
DFG
Reactive sputtering processes
In this project, a capacitively coupled plasma discharge with an externally applied magnetic field is investigated.
DFG
RF Plasma Jet
Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces
DFG
SIOx-Gradientenschichten
Plasma diagnostics of pulsed microwave plasmas with HF-bias combined with plasma-enhanced atomic layer deposition for the deposition of multilayer SiOx gradient coatings as barrier coating of flexible polymers
DFG
Strukturierte DBD
The project aims to fundamentally understand Patterned Dielectric Barrier Discharges for environmental applications of Volatile Organic Compounds (VOCs) pollutant removal from gas streams.
DFG
VOC-Konversion
Project A7 of the DFG funded SFB 1316 aims at the fundamental understanding of a novel twin surface dielectric barrier discharge for the purification and sterilization of gas streams by means of plasma-assisted catalysis.
Industrie
Ignition for modern gasoline engines
Spark ignition systems are used in many applications. One important application is the ignition of fuel-air-mixtures inside the cylinder of an Otto engine.
