
2D Particle-in-Cell
Realistic 2D Particle-in-Cell simulations of charged particle dynamics in low pressure capacitively coupled radio frequency plasmas
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The research at AEPT and BPT is divided into four research areas, which have a large overlap in content due to the interdisciplinary nature of plasma technology.
Our research is supported to a significant extent by public funding sources. These are in detail:
The lists of ongoing and already completed DFG projects can be found here:
As part of our research, we are members of the following coordinated research initiatives of the DFG, among others:
Realistic 2D Particle-in-Cell simulations of charged particle dynamics in low pressure capacitively coupled radio frequency plasmas
Controlling the electron dynamics in radio-frequency driven micro plasma jets for efficient CO2 conversion
Research on novel, flexible sensor systems based on two-dimensional material systems
With the help of the MRP, direct internal parameters can be recorded stable in real time for plasma-based surface treatments.
Wafer-level sensor structure for measurements of the ion energy distribution function and the ion angle distribution function in low-pressure plasmas
In subproject C1, a novel reactor concept for reactive sputtering processes in the form of a large-area capacitively coupled multi-frequency discharge (MFCCP) is developed, characterized and optimized.
Multiscale Transport Modeling: From Process Plasmas to Resistive Switching Devices
Physically Unclonable Functions (PUF) and True Random Number Generation (TRNG) are two components that are widely used today to generate random bit streams in security applications.
From ns- to ms-pulses – influence of voltage characteristics on surface barrier discharges
Transferprojekt T06 im SFB-TR 87 Wartungsarme kontinuierliche Air2Air PECVD-Folienbeschichtung durch In-Plasma Konzept (In-Plasma-Air2Air) In
In this project, a capacitively coupled plasma discharge with an externally applied magnetic field is investigated.
Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces
Plasma diagnostics of pulsed microwave plasmas with HF-bias combined with plasma-enhanced atomic layer deposition for the deposition of multilayer SiOx gradient coatings as barrier coating of flexible polymers
The project aims to fundamentally understand Patterned Dielectric Barrier Discharges for environmental applications of Volatile Organic Compounds (VOCs) pollutant removal from gas streams.
Project A7 of the DFG funded SFB 1316 aims at the fundamental understanding of a novel twin surface dielectric barrier discharge for the purification and sterilization of gas streams by means of plasma-assisted catalysis.
Spark ignition systems are used in many applications. One important application is the ignition of fuel-air-mixtures inside the cylinder of an Otto engine.
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