Expertises and Devices

Multipole Resonance Probe

The Multipole Resonance Probe (MRP) is a plasma diagnostic that measures and evaluates live with real-time capable electronics. In low-pressure plasmas, it provides the electron density, the electron collision frequency and the electron temperature - in other words, the most important plasma parameters.


Using our scanning electron microscope (SEM) in combination with a detector for energy dispersive X-ray spectroscopy (EDX), we can quickly and easily view plasma-treated surface structures with nanometer resolution and analyze their elemental composition.