IEDF Sensor
Wafer-level sensor structure for measurements of the ion energy distribution function and the ion angle distribution function in low-pressure plasmas
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Projekt
Multiskalentransport
Multiscale Transport Modeling: From Process Plasmas to Resistive Switching Devices
House of Plasma
With the help of the MRP, direct internal parameters can be recorded stable in real time for plasma-based surface treatments.
2D Particle-in-Cell
Realistic 2D Particle-in-Cell simulations of charged particle dynamics in low pressure capacitively coupled radio frequency plasmas
CO2 Plasma Jet
Controlling the electron dynamics in radio-frequency driven micro plasma jets for efficient CO2 conversion
RF Plasma Jet
Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces
