Senior Researcher
Address
Ruhr-Universität Bochum
Fakultät für Elektrotechnik und Informationstechnik
Angewandte Elektrodynamik und Plasmatechnik
Universitätsstraße 150
D-44801 Bochum, Germany
Room
ID 1/517
Phone
+49 234 32 29445
Email
wang(at)aept.rub.de
Publications
2825793
Li Wang
apa
50
date
desc
year
1
Wang
393
https://www.aept.ruhr-uni-bochum.de/wp-content/plugins/zotpress/
%7B%22status%22%3A%22success%22%2C%22updateneeded%22%3Afalse%2C%22instance%22%3A%22zotpress-ef5779171b69b44956464d79d2983292%22%2C%22meta%22%3A%7B%22request_last%22%3A0%2C%22request_next%22%3A0%2C%22used_cache%22%3Atrue%7D%2C%22data%22%3A%5B%7B%22key%22%3A%22BG6ESMLU%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Liu%20et%20al.%22%2C%22parsedDate%22%3A%222024-07-03%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3ELiu%2C%20J.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20X.-K.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Zhao%2C%20K.%2C%20Liu%2C%20Y.%2C%20Song%2C%20Y.%2C%20%26amp%3B%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20Y.%20%282024%29.%20An%20experimental%20and%20computational%20investigation%20of%20discharge%20mode%20transitions%20in%20a%20partially%20magnetized%20radio%20frequency%20capacitively%20coupled%20oxygen%20discharge.%20%3Ci%3EPlasma%20Processes%20and%20Polymers%3C%5C%2Fi%3E%2C%20e2300219.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fppap.202300219%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fppap.202300219%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DBG6ESMLU%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22An%20experimental%20and%20computational%20investigation%20of%20discharge%20mode%20transitions%20in%20a%20partially%20magnetized%20radio%20frequency%20capacitively%20coupled%20oxygen%20discharge%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jia%5Cu2010Rui%22%2C%22lastName%22%3A%22Liu%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Xiao-Kun%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Kai%22%2C%22lastName%22%3A%22Zhao%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yong%5Cu2010Xin%22%2C%22lastName%22%3A%22Liu%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan%5Cu2010Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22You%5Cu2010Nian%22%2C%22lastName%22%3A%22Wang%22%7D%5D%2C%22abstractNote%22%3A%22A%20magnetized%20capacitively%20coupled%20oxygen%20plasma%20was%20studied%20synergistically%20using%20phase%20resolved%20optical%20emission%20spectroscopy%20and%20particle%5Cu2010based%20kinetic%20simulation.%20Discharge%20mode%20transitions%20from%20ambipolar%20mode%20into%20drift%20mode%20and%20finally%20into%20%5Cu03b1%20mode%20induced%20by%20increasing%20the%20magnetic%20field%20were%20observed%20at%20different%20driving%20frequencies%20and%20different%20electrode%20gaps.%20The%20simulation%20results%20demonstrate%20that%20the%20discharge%20operating%20in%20the%20same%20mode%20exhibits%20a%20similar%20degree%20of%20electronegativity.%20By%20increasing%20driving%20frequency%20or%20electrode%20gap%2C%20the%20same%20discharge%20mode%20transition%20tends%20to%20occur%20at%20a%20lower%20magnetic%20field%2C%20and%2C%20meanwhile%2C%20the%20high%20electric%20field%20and%20electron%20power%20absorption%20shift%20from%20the%20bulk%20region%20to%20the%20sheath%20edge.%22%2C%22date%22%3A%222024-07-03%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1002%5C%2Fppap.202300219%22%2C%22ISSN%22%3A%221612-8850%2C%201612-8869%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fonlinelibrary.wiley.com%5C%2Fdoi%5C%2F10.1002%5C%2Fppap.202300219%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222024-07-11T12%3A00%3A45Z%22%7D%7D%2C%7B%22key%22%3A%22JRCKJY5J%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Tian%20et%20al.%22%2C%22parsedDate%22%3A%222024-07-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3ETian%2C%20C.-B.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Vass%2C%20M.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20X.-K.%2C%20Dong%2C%20W.%2C%20Song%2C%20Y.-H.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20Y.-N.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282024%29.%20The%20detachment-induced%20mode%20in%20electronegative%20capacitively%20coupled%20radio-frequency%20plasmas.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E33%3C%5C%2Fi%3E%287%29%2C%20075008.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fad5df8%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fad5df8%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DJRCKJY5J%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22The%20detachment-induced%20mode%20in%20electronegative%20capacitively%20coupled%20radio-frequency%20plasmas%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Chong-Biao%22%2C%22lastName%22%3A%22Tian%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22M%5Cu00e1t%5Cu00e9%22%2C%22lastName%22%3A%22Vass%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Xiao-Kun%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Wan%22%2C%22lastName%22%3A%22Dong%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22You-Nian%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22Insights%20into%20the%20spatio-temporally%20resolved%20electron%20power%20absorption%20dynamics%20in%20capacitively%20coupled%20radio-frequency%20plasmas%20are%20essential%20for%20understanding%20the%20fundamentals%20of%20their%20operation%20and%20as%20a%20basis%20for%20knowledge-based%20plasma%20process%20development.%20Similar%20to%20the%20%5Cu03b3-mode%2C%20an%20ionization%20maximum%20is%20observed%20at%20the%20sheath%20edge%20around%20the%20time%20of%20maximum%20sheath%20voltage%20in%20electronegative%20oxygen%20discharges%20at%20a%20pressure%20of%20300%20Pa.%20Based%20on%20Particle-in-Cell%5C%2FMonte%20Carlo%20Collisions%20%28PIC%5C%2FMCC%29%20simulations%2C%20we%20demonstrate%20that%20this%20maximum%20is%20not%20only%20caused%20by%20secondary%20electrons%20emitted%20at%20the%20electrode%20and%20collisionally%20multiplied%20inside%20the%20sheath.%20In%20fact%2C%20it%20also%20occurs%20in%20the%20complete%20absence%20of%20secondary%20electrons%20in%20the%20simulation%2C%20and%20is%20caused%20by%20the%20generation%20of%20O%5Cu2212%20ions%20by%20electron%20attachment%20close%20to%20the%20electrode%20during%20the%20local%20sheath%20collapse.%20These%20negative%20ions%20are%20accelerated%20towards%20the%20plasma%20bulk%20by%20the%20sheath%20electric%20field%20during%20sheath%20expansion.%20By%20electron%20detachment%20from%20these%20negative%20ions%2C%20electrons%20are%20generated%20inside%20the%20sheath%20and%20are%20accelerated%20towards%20the%20plasma%20bulk%20by%20the%20instantaneous%20sheath%20electric%20field%5Cu2014similarly%20to%20secondary%20electrons.%20Ionization%20is%20also%20observed%20in%20the%20plasma%20bulk%20and%20caused%20by%20electrons%20generated%20by%20detachment%20and%20accelerated%20by%20the%20high%20drift-and%20ambipolar%20electric%20fields.%20This%20detachment-induced%20electron%20power%20absorption%20is%20found%20to%20have%20significant%20effects%20on%20the%20discharge%20in%20the%20presence%20and%20absence%20of%20secondary%20electron%20emission.%20Its%20fundamentals%20are%20understood%20based%20on%20an%20analysis%20of%20the%20spatio-temporal%20electron%20and%20O%5Cu2212%20power%20absorption%20dynamics%20as%20well%20as%20the%20trajectory%20of%20selected%20O%5Cu2212%20ions%20close%20to%20the%20electrode.%22%2C%22date%22%3A%222024-07-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fad5df8%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fad5df8%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222024-07-16T15%3A35%3A36Z%22%7D%7D%2C%7B%22key%22%3A%227MN3L3QZ%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222023-04-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Hartmann%2C%20P.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Song%2C%20Y.-H.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282023%29.%20Effects%20of%20a%20radial%20variation%20of%20surface%20coefficients%20on%20plasma%20uniformity%20in%20capacitive%20RF%20discharges.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E32%3C%5C%2Fi%3E%284%29%2C%20045002.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Facc6e9%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Facc6e9%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D7MN3L3QZ%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Effects%20of%20a%20radial%20variation%20of%20surface%20coefficients%20on%20plasma%20uniformity%20in%20capacitive%20RF%20discharges%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22With%20the%20increasing%20demands%20toward%20large%20area%20plasma%20etching%20and%20deposition%2C%20the%20radial%20uniformity%20of%20capacitively%20coupled%20plasmas%20%28CCPs%29%20becomes%20one%20of%20the%20key%20factors%20that%20determine%20process%20performance%20in%20industrial%20applications.%20However%2C%20there%20is%20a%20variety%20of%20parasitic%20effects%2C%20e.g.%20electromagnetic%20and%20electrostatic%20edge%20effects%2C%20that%20typically%20lead%20to%20the%20formation%20of%20nonuniform%20radial%20plasma%20density%20profiles%20at%20various%20discharge%20conditions%20with%20a%20density%20peak%20appearing%20either%20at%20the%20center%20or%20near%20the%20edges%20of%20the%20electrodes.%20Moreover%2C%20in%20commercial%20CCPs%20different%20surface%20materials%20are%20in%20contact%20with%20the%20plasma%20at%20various%20positions%20as%20parts%20of%20boundary%20surfaces%20such%20as%20focus%20rings%2C%20masks%2C%20showerhead%20electrodes%2C%20wall%20and%5C%2For%20target%20materials.%20Via%20complex%20material%20specific%20plasma-surface%20interactions%2C%20the%20presence%20of%20such%20different%20surface%20materials%20affects%20plasma%20uniformity%20in%20a%20way%20that%20is%20typically%20not%20understood%20and%2C%20thus%2C%20not%20controlled.%20In%20this%20work%2C%20aided%20by%202d3v%20graphics%20processing%20unit%20accelerated%20particle-in-cell%5C%2FMonte%20Carlo%20collision%20simulations%2C%20we%20study%20the%20effects%20of%20radial%20variations%20of%20electrode%20materials%20on%20the%20plasma%20via%20their%20different%20ion%20and%20electron%20induced%20secondary%20electron%20emission%20as%20well%20as%20electron%20reflection%20coefficients%20on%20the%20discharge%20characteristics.%20Based%20on%20such%20fundamental%20understanding%20we%20tailor%20the%20radial%20variation%20of%20boundary%20surface%20materials%20to%20improve%20plasma%20uniformity%20in%20low%20pressure%20CCPs.%20Such%20investigations%20are%20performed%20at%20different%20neutral%20gas%20pressures%2C%20where%20both%20center%20and%20edge%20high%20radial%20plasma%20density%20profiles%20form%20in%20the%20presence%20of%20radially%20uniform%20surface%20coefficients%20that%20resemble%20the%20presence%20of%20a%20single%20electrode%20material.%20It%20is%20demonstrated%20that%20by%20radially%20varying%20the%20surface%20coefficients%20at%20the%20grounded%20electrode%2C%20the%20radial%20plasma%20density%20profile%20can%20be%20finely%20adjusted%20and%20the%20plasma%20uniformity%20above%20the%20wafer%20placed%20at%20the%20powered%20electrode%20can%20be%20improved%20in%20both%20cases.%22%2C%22date%22%3A%222023-04-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Facc6e9%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Facc6e9%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222023-04-17T13%3A51%3A09Z%22%7D%7D%2C%7B%22key%22%3A%22TZ2KXQWQ%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Vass%20et%20al.%22%2C%22parsedDate%22%3A%222022-11-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EVass%2C%20M.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Wilczek%2C%20S.%2C%20Lafleur%2C%20T.%2C%20Brinkmann%2C%20R.%20P.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282022%29.%20Frequency%20coupling%20in%20low-pressure%20dual-frequency%20capacitively%20coupled%20plasmas%20revisited%20based%20on%20the%20Boltzmann%20term%20analysis.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E31%3C%5C%2Fi%3E%2811%29%2C%20115004.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac9754%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac9754%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DTZ2KXQWQ%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Frequency%20coupling%20in%20low-pressure%20dual-frequency%20capacitively%20coupled%20plasmas%20revisited%20based%20on%20the%20Boltzmann%20term%20analysis%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22M%5Cu00e1t%5Cu00e9%22%2C%22lastName%22%3A%22Vass%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Sebastian%22%2C%22lastName%22%3A%22Wilczek%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Trevor%22%2C%22lastName%22%3A%22Lafleur%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ralf%20Peter%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22Electron%20power%20absorption%20dynamics%20is%20investigated%20in%20radio-frequency%20%28RF%29%20argon%20capacitively%20coupled%20plasmas%20%28CCPs%29%20at%20low%20pressure%20%284%5Cu201370%20Pa%29%20excited%20by%20a%20dual-frequency%20waveform%20with%20frequencies%20of%2027.12%20MHz%20and%201.937%20MHz.%20Based%20on%20the%20spatio-temporal%20dynamics%20of%20the%20ambipolar%20electric%20field%20a%20novel%20interpretation%20of%20the%20mechanism%20of%20frequency%20coupling%20is%20given%2C%20which%20is%20not%20based%20on%20the%20hard%20wall%20model%2C%20as%20in%20previous%20explanations.%20Within%20this%20framework%2C%20frequency%20coupling%20arises%20due%20to%20the%20decreased%20size%20of%20the%20ambipolar%20region%20outside%20the%20sheath%20when%20the%20low-frequency%20sheath%20is%20close%20to%20its%20full%20expansion%2C%20which%20leads%20to%20decreased%20ionization%20in%20this%20region.%20It%20is%20shown%2C%20under%20the%20circumstances%20considered%20here%2C%20ohmic%20power%20absorption%20is%20dominant.%20The%20spatio-temporally%20averaged%20ambipolar%20power%20absorption%20shows%20nonmonotonic%20behaviour%20as%20a%20function%20of%20pressure%2C%20first%20increasing%2C%20then%2C%20after%20reaching%20a%20local%20maximum%2C%20decreasing%20as%20the%20pressure%20is%20increased.%20It%20is%20shown%2C%20that%20the%20reason%20for%20this%20nonmonotonic%20behaviour%20is%20ultimately%20connected%20to%20the%20frequency%20coupling%20mechanism.%22%2C%22date%22%3A%222022-11-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fac9754%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fac9754%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-11-09T16%3A14%3A17Z%22%7D%7D%2C%7B%22key%22%3A%22DNM8AMLS%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222022-10-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Vass%2C%20M.%2C%20Lafleur%2C%20T.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Song%2C%20Y.-H.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282022%29.%20On%20the%20validity%20of%20the%20classical%20plasma%20conductivity%20in%20capacitive%20RF%20discharges.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E31%3C%5C%2Fi%3E%2810%29%2C%20105013.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac95c1%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac95c1%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DDNM8AMLS%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22On%20the%20validity%20of%20the%20classical%20plasma%20conductivity%20in%20capacitive%20RF%20discharges%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22M%5Cu00e1t%5Cu00e9%22%2C%22lastName%22%3A%22Vass%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Trevor%22%2C%22lastName%22%3A%22Lafleur%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22The%20plasma%20conductivity%20is%20an%20important%20input%20parameter%20for%20various%20plasma%20models.%20It%20is%20typically%20obtained%20from%20a%20simplified%20version%20of%20the%20electron%20momentum%20balance%20equation%2C%20where%20only%20a%20single%20inertia%20term%20and%20a%20simplified%20description%20of%20the%20collisional%20momentum%20transfer%20are%20included.%20The%20electric%20field%20is%20assumed%20to%20be%20a%20harmonic%20function%20of%20the%20driving%20frequency%2C%20higher%20harmonics%20of%20the%20current%20and%20spatial%20variations%20are%20neglected.%20Through%20particle-in-cell%5C%2FMonte%20Carlo%20collision%20%28PIC%5C%2FMCC%29%20simulations%20and%20analysis%20of%20the%20electric%20field%20generation%20based%20on%20velocity%20moments%20of%20the%20Boltzmann%20equation%2C%20the%20validity%20of%20this%20classical%20model%20is%20studied%20in%20capacitively%20coupled%20plasmas%20%28CCPs%29.%20We%20find%20that%20these%20assumptions%5C%2Fsimplifications%20result%20in%20significant%20inaccuracies%20of%20the%20conductivity%20in%20many%20cases.%20In%20single%20frequency%20CCPs%2C%20a%20deviation%20of%20more%20than%20an%20order%20of%20magnitude%20from%20the%20effective%20PIC-conductivity%20obtained%20from%20the%20simulations%20is%20found%20at%20low%20pressures%20in%20the%20discharge%20center%20and%20at%20the%20maximum%20sheath%20edge.%20In%20the%20center%2C%20this%20deviation%20is%20caused%20by%20neglecting%20the%20temperature%20gradient%20term%20in%20the%20momentum%20balance%20equation%20and%20adopting%20an%20approximation%20of%20the%20Ohmic%20term%20in%20the%20classical%20model%2C%20while%20at%20the%20maximum%20sheath%20edge%20it%20is%20induced%20by%20neglecting%20the%20density%20gradient%20term%20that%20accounts%20for%20the%20effect%20of%20the%20ambipolar%20electric%20field.%20The%20inaccuracy%20in%20the%20discharge%20center%20is%20reduced%20at%20higher%20pressures%20where%20the%20Ohmic%20term%20dominates%20and%20the%20approximations%20made%20in%20the%20classical%20model%20are%20more%20applicable.%20Better%20performance%20of%20the%20classical%20model%20is%20also%20found%20under%20conditions%20at%20which%20the%20inertia%20term%20included%20in%20the%20model%20plays%20an%20important%20role.%20Generally%2C%20neglecting%20higher%20harmonics%20of%20the%20current%20and%20spatial%20variations%20of%20plasma%20parameters%20is%20found%20to%20cause%20strong%20inaccuracies.%20Thus%2C%20the%20classical%20model%20can%20result%20in%20an%20inaccurate%20calculation%20of%20the%20power%20absorbed%20by%20electrons.%20Our%20results%20indicate%20that%20its%20applicability%20must%20be%20evaluated%20for%20a%20given%20set%20of%20conditions%20before%20using%20it%20to%20avoid%20introducing%20errors%20to%20plasma%20models.%22%2C%22date%22%3A%222022-10-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fac95c1%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fac95c1%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-10-24T06%3A07%3A37Z%22%7D%7D%2C%7B%22key%22%3A%224SKI9N9V%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222022-06-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Vass%2C%20M.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Hartmann%2C%20P.%2C%20Derzsi%2C%20A.%2C%20Song%2C%20Y.-H.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282022%29.%20Electropositive%20core%20in%20electronegative%20magnetized%20capacitive%20radio%20frequency%20plasmas.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E31%3C%5C%2Fi%3E%286%29%2C%2006LT01.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac5ec7%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac5ec7%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D4SKI9N9V%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Electropositive%20core%20in%20electronegative%20magnetized%20capacitive%20radio%20frequency%20plasmas%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22M%5Cu00e1t%5Cu00e9%22%2C%22lastName%22%3A%22Vass%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Aranka%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22The%20magnetized%20drift-ambipolar%20%28%5Cu2018m-DA%5Cu2019%29%20electron%20power%20absorption%20mode%20and%20a%20sequence%20of%20structural%20transitions%2C%20including%20the%20formation%20of%20an%20electropositive%20core%20where%20the%20electron%20density%20is%20much%20higher%20than%20the%20negative%20ion%20density%2C%20are%20identified%20in%20a%20magnetized%20capacitive%20Radio-Frequency%20%28RF%29%20plasma%20of%20a%20strongly%20electronegative%20gas%2C%20CF4.%20The%20m-DA%20mode%20is%20caused%20by%20a%20magnetic%20enhancement%20of%20the%20bulk%20electric%20field%20due%20to%20the%20attenuation%20of%20the%20electron%20transport%20and%20plasma%20conductivity%20across%20the%20magnetic%20field.%20This%20leads%20to%20the%20formation%20of%20ionization%20maxima%20at%20distinct%20axial%20positions%20and%20a%20local%20trapping%20of%20electrons%20by%20the%20magnetic%20field%20as%20a%20function%20of%20its%20strength.%22%2C%22date%22%3A%222022-06-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fac5ec7%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fac5ec7%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-06-16T18%3A33%3A29Z%22%7D%7D%2C%7B%22key%22%3A%22NW38IHAA%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22lastModifiedByUser%22%3A%7B%22id%22%3A7499565%2C%22username%22%3A%22manuel.schroeder.rub%22%2C%22name%22%3A%22%22%2C%22links%22%3A%7B%22alternate%22%3A%7B%22href%22%3A%22https%3A%5C%2F%5C%2Fwww.zotero.org%5C%2Fmanuel.schroeder.rub%22%2C%22type%22%3A%22text%5C%2Fhtml%22%7D%7D%7D%2C%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222021-10-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Vass%2C%20M.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Hartmann%2C%20P.%2C%20Derzsi%2C%20A.%2C%20Song%2C%20Y.-H.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282021%29.%20Magnetic%20attenuation%20of%20the%20self-excitation%20of%20the%20plasma%20series%20resonance%20in%20low-pressure%20capacitively%20coupled%20discharges.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E30%3C%5C%2Fi%3E%2810%29%2C%2010LT01.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac287b%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac287b%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DNW38IHAA%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Magnetic%20attenuation%20of%20the%20self-excitation%20of%20the%20plasma%20series%20resonance%20in%20low-pressure%20capacitively%20coupled%20discharges%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22M%5Cu00e1t%5Cu00e9%22%2C%22lastName%22%3A%22Vass%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Aranka%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22External%20magnetic%20fields%20impose%20diverse%20effects%20on%20low-temperature%20plasmas.%20We%20study%20these%20in%20a%20low-pressure%20capacitively%20coupled%20radio%20frequency%20plasma%20in%20argon%20via%20self-consistent%20kinetic%20simulations.%20The%20primary%20effect%20of%20the%20transversal%20magnetic%20field%2C%20that%20manifests%20itself%20in%20the%20trapping%20of%20electrons%20at%20lower%20excitation%20frequencies%20and%2C%20thus%2C%20in%20an%20increase%20of%20the%20plasma%20density%20as%20a%20function%20of%20the%20magnetic%20field%2C%20is%20overruled%20at%20higher%20excitation%20frequencies%20by%20the%20attenuation%20of%20the%20self-excitation%20of%20plasma%20series%20resonance%20oscillations%20and%20the%20attenuation%20of%20non-linear%20electron%20resonance%20heating%2C%20which%20lead%20to%20a%20reduced%20plasma%20density.%20At%20higher%20magnetic%20fields%20the%20plasma%20density%20increases%20again%20due%20to%20%28i%29%20a%20longer%20interaction%20time%20between%20the%20electrons%20and%20the%20edges%20of%20the%20expanding%20sheaths%20and%20%28ii%29%20the%20electric%20field%20reversals%20that%20develop%20at%20the%20collapsing%20sheath%20edges%20to%20overcome%20the%20trapping%20of%20electrons%20and%20accelerate%20them%20towards%20the%20electrodes.%22%2C%22date%22%3A%222021-10-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fac287b%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fac287b%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-01-04T09%3A51%3A27Z%22%7D%7D%2C%7B%22key%22%3A%2243UVPE8P%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22lastModifiedByUser%22%3A%7B%22id%22%3A7499565%2C%22username%22%3A%22manuel.schroeder.rub%22%2C%22name%22%3A%22%22%2C%22links%22%3A%7B%22alternate%22%3A%7B%22href%22%3A%22https%3A%5C%2F%5C%2Fwww.zotero.org%5C%2Fmanuel.schroeder.rub%22%2C%22type%22%3A%22text%5C%2Fhtml%22%7D%7D%7D%2C%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222021-08-01%22%2C%22numChildren%22%3A2%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Hartmann%2C%20P.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Song%2C%20Y.-H.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282021%29.%202D%20Particle-in-cell%20simulations%20of%20charged%20particle%20dynamics%20in%20geometrically%20asymmetric%20low%20pressure%20capacitive%20RF%20plasmas.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E30%3C%5C%2Fi%3E%288%29%2C%20085011.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fabf206%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fabf206%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D43UVPE8P%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%222D%20Particle-in-cell%20simulations%20of%20charged%20particle%20dynamics%20in%20geometrically%20asymmetric%20low%20pressure%20capacitive%20RF%20plasmas%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22%22%2C%22date%22%3A%222021-08-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fabf206%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fabf206%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-01-04T09%3A51%3A46Z%22%7D%7D%2C%7B%22key%22%3A%22BXMZU32N%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22lastModifiedByUser%22%3A%7B%22id%22%3A7499565%2C%22username%22%3A%22manuel.schroeder.rub%22%2C%22name%22%3A%22%22%2C%22links%22%3A%7B%22alternate%22%3A%7B%22href%22%3A%22https%3A%5C%2F%5C%2Fwww.zotero.org%5C%2Fmanuel.schroeder.rub%22%2C%22type%22%3A%22text%5C%2Fhtml%22%7D%7D%7D%2C%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222021-05-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Hartmann%2C%20P.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Song%2C%20Y.-H.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282021%29.%202D%20particle-in-cell%20simulations%20of%20geometrically%20asymmetric%20low-pressure%20capacitive%20RF%20plasmas%20driven%20by%20tailored%20voltage%20waveforms.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E30%3C%5C%2Fi%3E%285%29%2C%20054001.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fabf31d%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fabf31d%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DBXMZU32N%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%222D%20particle-in-cell%20simulations%20of%20geometrically%20asymmetric%20low-pressure%20capacitive%20RF%20plasmas%20driven%20by%20tailored%20voltage%20waveforms%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22The%20effects%20of%20the%20simultaneous%20presence%20of%20two%20different%20types%20of%20plasma%20asymmetry%2C%20viz%2C%20geometric%20and%20electrical%2C%20on%20low-pressure%20capacitively%20coupled%20argon%20discharges%20are%20studied%20by%202D3V%20graphics-processing-unit-based%20particle-in-cell%5C%2FMonte%20Carlo%20simulations.%20The%20geometric%20asymmetry%20originates%20from%20the%20different%20powered%20vs%20grounded%20electrode%20surface%20areas%2C%20while%20the%20electrical%20asymmetry%20is%20established%20by%20applying%20peaks%5C%2Fvalleys%20and%20sawtooth-up%5C%2F-down%20driving%20voltage%20waveforms.%20While%20in%20geometrically%20symmetric%20discharges%2C%20the%20%7Bpeaks%20%5Cu2194%20valleys%7D%20and%20the%20%7Bsawtooth-down%20%5Cu2194%20sawtooth-up%7D%20switching%20of%20the%20waveforms%20is%20equivalent%20to%20exchanging%20the%20powered%20and%20grounded%20electrodes%2C%20this%20transformation%20is%20violated%20when%20the%20geometric%20symmetry%20is%20broken.%20Under%20such%20conditions%2C%20the%20plasma%20characteristics%20and%20the%20DC%20self-bias%20generation%20behave%20differently%2C%20compared%20to%20the%20geometrically%20symmetric%20case.%20This%20leads%20to%20different%20sheath%20dynamics%20and%2C%20therefore%2C%20strongly%20influences%20the%20electron%20power%20absorption%20dynamics.%20For%20identical%20peak-to-peak%20voltages%2C%20the%20plasma%20density%20obtained%20for%20such%20tailored%20voltage%20waveforms%20is%20found%20to%20be%20higher%20compared%20to%20the%20classical%20single-frequency%20waveform%20case.%20Reduced%20plasma%20densities%20are%20found%20in%20the%20valleys-%20and%20sawtooth-down%20waveform%20cases%2C%20compared%20to%20the%20peaks-%20and%20sawtooth-up%20waveforms.%20By%20including%20realistic%20energy%20and%20material-dependent%20secondary%20electron%20emission%20%28SEE%29%20coefficients%20in%20the%20simulations%2C%20the%20electron-induced%20SEE%20is%20found%20to%20be%20reduced%20in%20the%20valleysand%20sawtooth-down%20waveform%20cases%2C%20which%20explains%20the%20behaviour%20of%20the%20plasma%20density.%20Using%20such%20tailored%20waveforms%20in%20geometrically%20asymmetric%20discharges%20is%20also%20found%20to%20lead%20to%20the%20formation%20of%20different%20charged%20particle%20energy%20distributions%20at%20the%20boundary%20surfaces%2C%20compared%20to%20those%20in%20geometrically%20symmetric%20plasma%20sources.%22%2C%22date%22%3A%222021-05-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fabf31d%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fabf31d%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-01-04T09%3A51%3A45Z%22%7D%7D%2C%7B%22key%22%3A%22I6NRKIA7%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22lastModifiedByUser%22%3A%7B%22id%22%3A7499565%2C%22username%22%3A%22manuel.schroeder.rub%22%2C%22name%22%3A%22%22%2C%22links%22%3A%7B%22alternate%22%3A%7B%22href%22%3A%22https%3A%5C%2F%5C%2Fwww.zotero.org%5C%2Fmanuel.schroeder.rub%22%2C%22type%22%3A%22text%5C%2Fhtml%22%7D%7D%7D%2C%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222021%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Hartmann%2C%20P.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Song%2C%20Y.-H.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282021%29.%20Effects%20of%20structured%20electrodes%20on%20electron%20power%20absorption%20and%20plasma%20uniformity%20in%20capacitive%20RF%20discharges.%20%3Ci%3EJ.%20Vac.%20Sci.%20Technol.%20A%3C%5C%2Fi%3E%2C%20%3Ci%3E39%3C%5C%2Fi%3E%2C%20063004.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1116%5C%2F6.0001327%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1116%5C%2F6.0001327%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DI6NRKIA7%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Effects%20of%20structured%20electrodes%20on%20electron%20power%20absorption%20and%20plasma%20uniformity%20in%20capacitive%20RF%20discharges%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22The%20electron%20power%20absorption%20dynamics%20and%20plasma%20uniformity%20in%20low%20pressure%20capacitively%20coupled%20RF%20discharges%20with%20structured%20electrodes%20are%20investigated%20by%20graphics%20processing%20unit-based%202d3v%20particle-in-cell%5C%2FMonte%20Carlo%20simulations%20in%20argon%20gas.%20In%20the%20presence%20of%20planar%20electrodes%2C%20the%20plasma%20is%20radially%20nonuniform%20due%20to%20strong%20electron%20density%20peaks%20close%20to%20the%20reactor%20sidewall%2C%20which%20are%20caused%20by%20edge%20effects%20that%20locally%20enhance%20the%20electron%20power%20absorption%20and%20ionization.%20Such%20a%20local%20enhancement%20of%20these%20characteristics%20can%20also%20be%20achieved%20in%20a%20controllable%20manner%20by%20using%20a%20single%20ring-shaped%20rectangular%20trench%20embedded%20in%20the%20powered%20electrode%20close%20to%20the%20reactor%20center.%20This%20effect%20is%20understood%20by%20analyzing%20the%20trajectories%20of%20selected%20electrons%20as%20well%20as%20the%20time%20evolution%20of%20their%20energy%20and%20velocity%20inside%20and%20above%20such%20trenches.%20Electrons%20are%20found%20to%20gain%20high%20energies%20inside%20the%20trench%20by%20bouncing%20between%20the%20sheaths%20at%20the%20trench%20walls%20during%20the%20sheath%20expansion%20phase.%20Combined%20with%20the%20cross-firing%20of%20energetic%20electrons%20at%20the%20trench%20orifice%2C%20this%20leads%20to%20high%20local%20ionization%20rates.%20Using%20these%20trench%20effects%2C%20the%20plasma%20uniformity%20above%20the%20wafer%20placed%20on%20a%20planar%20powered%20electrode%20can%20be%20remarkably%20improved%20by%20including%20multiple%20trenches%20in%20the%20opposing%20grounded%20electrode%2C%20which%20enhance%20the%20ionization%20and%20plasma%20density%20at%20their%20respective%20radial%20positions.%20Meanwhile%2C%20the%20ion%20flux-energy%20distribution%20function%20at%20the%20wafer%20is%20found%20to%20be%20almost%20unaffected.%22%2C%22date%22%3A%2211%5C%2F2021%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1116%5C%2F6.0001327%22%2C%22ISSN%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1116%5C%2F6.0001327%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-01-04T09%3A51%3A43Z%22%7D%7D%2C%7B%22key%22%3A%22WBLI6F4T%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22lastModifiedByUser%22%3A%7B%22id%22%3A7499565%2C%22username%22%3A%22manuel.schroeder.rub%22%2C%22name%22%3A%22%22%2C%22links%22%3A%7B%22alternate%22%3A%7B%22href%22%3A%22https%3A%5C%2F%5C%2Fwww.zotero.org%5C%2Fmanuel.schroeder.rub%22%2C%22type%22%3A%22text%5C%2Fhtml%22%7D%7D%7D%2C%22creatorSummary%22%3A%22Hartmann%20et%20al.%22%2C%22parsedDate%22%3A%222021%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EHartmann%2C%20P.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20N%26%23xF6%3Bsges%2C%20K.%2C%20Berger%2C%20B.%2C%20Wilczek%2C%20S.%2C%20Brinkmann%2C%20R.%20P.%2C%20Mussenbrock%2C%20T.%2C%20Juhasz%2C%20Z.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Derzsi%2C%20A.%2C%20Lee%2C%20E.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282021%29.%20Control%20of%20electron%20velocity%20distributions%20at%20the%20wafer%20by%20tailored%20voltage%20waveforms%20in%20capacitively%20coupled%20plasmas%20to%20compensate%20surface%20charging%20in%20high-aspect%20ratio%20etch%20features.%20%3Ci%3EJournal%20of%20Physics%20D%3A%20Applied%20Physics%3C%5C%2Fi%3E%2C%20%3Ci%3E54%3C%5C%2Fi%3E%2C%20255202.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6463%5C%2Fabf229%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6463%5C%2Fabf229%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DWBLI6F4T%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Control%20of%20electron%20velocity%20distributions%20at%20the%20wafer%20by%20tailored%20voltage%20waveforms%20in%20capacitively%20coupled%20plasmas%20to%20compensate%20surface%20charging%20in%20high-aspect%20ratio%20etch%20features%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22P%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22K%22%2C%22lastName%22%3A%22N%5Cu00f6sges%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22B%22%2C%22lastName%22%3A%22Berger%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22S%22%2C%22lastName%22%3A%22Wilczek%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22R%20P%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22T%22%2C%22lastName%22%3A%22Mussenbrock%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Juhasz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22A%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Eunwoo%22%2C%22lastName%22%3A%22Lee%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22%22%2C%22date%22%3A%222021%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%22%22%2C%22ISSN%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6463%5C%2Fabf229%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-18T08%3A55%3A12Z%22%7D%7D%2C%7B%22key%22%3A%223VKDD3D4%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222021%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%20L.%2C%20De-Qi%20W.%2C%20Chong-Biao%20T.%2C%20Yuan-Hong%20S.%2C%20You-Nian%20W.%2C%20%26%23x5927%3B%26%23x8FDE%3B%26%23x7406%3B%26%23x5DE5%3B%26%23x5927%3B%26%23x5B66%3B%26%23x7269%3B%26%23x7406%3B%26%23x5B66%3B%26%23x9662%3B%2C%20%26%23x5927%3B%26%23x8FDE%3B%26%23x3000%3B116024%2CSchool%20of%20Physics%2C%20Dalian%20University%20of%20Technology%2C%20Dalian%20116024%2C%20China%2C%20%26%23x5FB7%3B%26%23x56FD%3B%26%23x6CE2%3B%26%23x9E3F%3B%26%23x9C81%3B%26%23x5C14%3B%26%23x5927%3B%26%23x5B66%3B%26%23x7535%3B%26%23x5B50%3B%26%23x5DE5%3B%26%23x7A0B%3B%26%23x4E0E%3B%26%23x4FE1%3B%26%23x606F%3B%26%23x79D1%3B%26%23x5B66%3B%26%23x5B66%3B%26%23x9662%3B%2C%20%26%23x6CE2%3B%26%23x9E3F%3B%26%23x3000%3BD-44780%2CDepartment%20of%20Electrical%20Engineering%20and%20Information%20Science%2C%20Ruhr-University%20Bochum%2C%20Bochum%20D-44780%2C%20Germany%2C%20%26amp%3B%20%26%23x7F8E%3B%26%23x56FD%3B%26%23x5BC6%3B%26%23x6B47%3B%26%23x6839%3B%26%23x5DDE%3B%26%23x7ACB%3B%26%23x5927%3B%26%23x5B66%3B%26%23x7535%3B%26%23x5B50%3B%26%23x4E0E%3B%26%23x8BA1%3B%26%23x7B97%3B%26%23x673A%3B%26%23x5DE5%3B%26%23x7A0B%3B%26%23x5B66%3B%26%23x9662%3B%2C%20%26%23x4E1C%3B%26%23x5170%3B%26%23x8F9B%3B%26%23x3000%3B48823%2CDepartment%20of%20Electrical%20and%20Computer%20Engineering%2C%20Michigan%20State%20University%2C%20East%20Lansing%2048823%2C%20USA.%20%282021%29.%20Electron%20heating%20dynamics%20and%20plasma%20parameters%20control%20in%20capacitively%20coupled%20plasma.%20%3Ci%3EActa%20Physica%20Sinica%3C%5C%2Fi%3E%2C%20%3Ci%3E70%3C%5C%2Fi%3E%289%29%2C%20095214%26%23x2013%3B095214.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.7498%5C%2Faps.70.20210473%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.7498%5C%2Faps.70.20210473%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D3VKDD3D4%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Electron%20heating%20dynamics%20and%20plasma%20parameters%20control%20in%20capacitively%20coupled%20plasma%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Wen%22%2C%22lastName%22%3A%22De-Qi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Tian%22%2C%22lastName%22%3A%22Chong-Biao%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Song%22%2C%22lastName%22%3A%22Yuan-Hong%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Wang%22%2C%22lastName%22%3A%22You-Nian%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22name%22%3A%22%5Cu5927%5Cu8fde%5Cu7406%5Cu5de5%5Cu5927%5Cu5b66%5Cu7269%5Cu7406%5Cu5b66%5Cu9662%2C%20%5Cu5927%5Cu8fde%5Cu3000116024%2CSchool%20of%20Physics%2C%20Dalian%20University%20of%20Technology%2C%20Dalian%20116024%2C%20China%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22name%22%3A%22%5Cu5fb7%5Cu56fd%5Cu6ce2%5Cu9e3f%5Cu9c81%5Cu5c14%5Cu5927%5Cu5b66%5Cu7535%5Cu5b50%5Cu5de5%5Cu7a0b%5Cu4e0e%5Cu4fe1%5Cu606f%5Cu79d1%5Cu5b66%5Cu5b66%5Cu9662%2C%20%5Cu6ce2%5Cu9e3f%5Cu3000D-44780%2CDepartment%20of%20Electrical%20Engineering%20and%20Information%20Science%2C%20Ruhr-University%20Bochum%2C%20Bochum%20D-44780%2C%20Germany%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22name%22%3A%22%5Cu7f8e%5Cu56fd%5Cu5bc6%5Cu6b47%5Cu6839%5Cu5dde%5Cu7acb%5Cu5927%5Cu5b66%5Cu7535%5Cu5b50%5Cu4e0e%5Cu8ba1%5Cu7b97%5Cu673a%5Cu5de5%5Cu7a0b%5Cu5b66%5Cu9662%2C%20%5Cu4e1c%5Cu5170%5Cu8f9b%5Cu300048823%2CDepartment%20of%20Electrical%20and%20Computer%20Engineering%2C%20Michigan%20State%20University%2C%20East%20Lansing%2048823%2C%20USA%22%7D%5D%2C%22abstractNote%22%3A%22%22%2C%22date%22%3A%222021%22%2C%22language%22%3A%22zh%22%2C%22DOI%22%3A%2210.7498%5C%2Faps.70.20210473%22%2C%22ISSN%22%3A%221000-3290%22%2C%22url%22%3A%22http%3A%5C%2F%5C%2Fwulixb.iphy.ac.cn%5C%2Farticle%5C%2Fdoi%5C%2F10.7498%5C%2Faps.70.20210473%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-18T07%3A05%3A30Z%22%7D%7D%2C%7B%22key%22%3A%228EEEHDKR%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22lastModifiedByUser%22%3A%7B%22id%22%3A7499565%2C%22username%22%3A%22manuel.schroeder.rub%22%2C%22name%22%3A%22%22%2C%22links%22%3A%7B%22alternate%22%3A%7B%22href%22%3A%22https%3A%5C%2F%5C%2Fwww.zotero.org%5C%2Fmanuel.schroeder.rub%22%2C%22type%22%3A%22text%5C%2Fhtml%22%7D%7D%7D%2C%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222020-10-20%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Wen%2C%20D.-Q.%2C%20Hartmann%2C%20P.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Derzsi%2C%20A.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20X.-F.%2C%20Song%2C%20Y.-H.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20Y.-N.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282020%29.%20Electron%20power%20absorption%20dynamics%20in%20magnetized%20capacitively%20coupled%20radio%20frequency%20oxygen%20discharges.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E29%3C%5C%2Fi%3E%2810%29%2C%20105004.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fabb2e7%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fabb2e7%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D8EEEHDKR%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Electron%20power%20absorption%20dynamics%20in%20magnetized%20capacitively%20coupled%20radio%20frequency%20oxygen%20discharges%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22De-Qi%22%2C%22lastName%22%3A%22Wen%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Zolt%5Cu00e1n%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Aranka%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Xi-Feng%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22You-Nian%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22The%20influence%20of%20a%20uniform%20magnetic%20field%20parallel%20to%20the%20electrodes%20on%20radio%20frequency%20capacitively%20coupled%20oxygen%20discharges%20driven%20at%2013.56%20MHz%20at%20a%20pressure%20of%20100%20mTorr%20is%20investigated%20by%20one-dimensional%20particle-in-cell%5C%2FMonte%20Carlo%20collision%20%281D%20PIC%5C%2FMCC%29%20simulations.%20Increasing%20the%20magnetic%20field%20from%200%20to%20200%20G%20is%20found%20to%20result%20in%20a%20drastic%20enhancement%20of%20the%20electron%20and%20the%20O%2B2%20ion%20density%20due%20to%20the%20enhanced%20confinement%20of%20electrons%20by%20the%20magnetic%20field.%20The%20time%20and%20space%20averaged%20O%5Cu2212%20ion%20density%2C%20however%2C%20is%20found%20to%20remain%20almost%20constant%2C%20since%20both%20the%20dissociative%20electron%20attachment%20%28production%20channel%20of%20O%5Cu2212%29%20and%20the%20associative%20electron%20detachment%20rate%20due%20to%20the%20collisions%20of%20negative%20ions%20with%20oxygen%20metastables%20%28main%20loss%20channel%20of%20O%5Cu2212%29%20are%20enhanced%20simultaneously.%20This%20is%20understood%20based%20on%20a%20detailed%20analysis%20of%20the%20spatio-temporal%20electron%20dynamics.%20The%20nearly%20constant%20O%5Cu2212%20density%20in%20conjunction%20with%20the%20increased%20electron%20density%20causes%20a%20significant%20reduction%20of%20the%20electronegativity%20and%20a%20pronounced%20change%20of%20the%20electron%20power%20absorption%20dynamics%20as%20a%20function%20of%20the%20externally%20applied%20magnetic%20field.%20While%20at%20low%20magnetic%20fields%20the%20discharge%20is%20operated%20in%20the%20electronegative%20drift-ambipolar%20mode%2C%20a%20transition%20to%20the%20electropositive%20%5Cu03b1-mode%20is%20induced%20by%20increasing%20the%20magnetic%20field.%20Meanwhile%2C%20a%20strong%20electric%20field%20reversal%20is%20generated%20near%20each%20electrode%20during%20the%20local%20sheath%20collapse%20at%20high%20magnetic%20fields%2C%20which%20locally%20enhances%20the%20electron%20power%20absorption.%20A%20model%20of%20the%20electric%20field%20generation%20reveals%20that%20the%20reversed%20electric%20field%20is%20caused%20by%20the%20reduction%20of%20the%20electron%20flux%20to%20the%20electrodes%20due%20to%20their%20trapping%20by%20the%20magnetic%20field.%20The%20consequent%20changes%20of%20the%20plasma%20properties%20are%20expected%20to%20affect%20the%20applications%20of%20such%20discharges%20in%20etching%2C%20deposition%20and%20other%20semiconductor%20processing%20technologies.%22%2C%22date%22%3A%222020-10-20%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fabb2e7%22%2C%22ISSN%22%3A%221361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fabb2e7%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-18T05%3A38%3A26Z%22%7D%7D%2C%7B%22key%22%3A%225XVIUJNV%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Hartmann%20et%20al.%22%2C%22parsedDate%22%3A%222020-07-29%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EHartmann%2C%20P.%2C%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20N%26%23xF6%3Bsges%2C%20K.%2C%20Berger%2C%20B.%2C%20Wilczek%2C%20S.%2C%20Brinkmann%2C%20R.%20P.%2C%20Mussenbrock%2C%20T.%2C%20Juhasz%2C%20Z.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Derzsi%2C%20A.%2C%20Lee%2C%20E.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282020%29.%20Charged%20particle%20dynamics%20and%20distribution%20functions%20in%20low%20pressure%20dual-frequency%20capacitively%20coupled%20plasmas%20operated%20at%20low%20frequencies%20and%20high%20voltages.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E54%3C%5C%2Fi%3E%2C%20075014.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9374%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9374%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D5XVIUJNV%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Charged%20particle%20dynamics%20and%20distribution%20functions%20in%20low%20pressure%20dual-frequency%20capacitively%20coupled%20plasmas%20operated%20at%20low%20frequencies%20and%20high%20voltages%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22P%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22K%22%2C%22lastName%22%3A%22N%5Cu00f6sges%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22B%22%2C%22lastName%22%3A%22Berger%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22S%22%2C%22lastName%22%3A%22Wilczek%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22R%20P%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22T%22%2C%22lastName%22%3A%22Mussenbrock%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Juhasz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22A%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Eunwoo%22%2C%22lastName%22%3A%22Lee%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22%22%2C%22date%22%3A%222020-07-29%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fab9374%22%2C%22ISSN%22%3A%221361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9374%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-07-06T16%3A16%3A59Z%22%7D%7D%2C%7B%22key%22%3A%2273P6YI7X%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Wang%20et%20al.%22%2C%22parsedDate%22%3A%222019-05-13%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3E%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20L.%2C%20Wen%2C%20D.-Q.%2C%20Zhang%2C%20Q.-Z.%2C%20Song%2C%20Y.-H.%2C%20Zhang%2C%20Y.-R.%2C%20%26amp%3B%20%3Cstrong%3EWang%3C%5C%2Fstrong%3E%2C%20Y.-N.%20%282019%29.%20Disruption%20of%20self-organized%20striated%20structure%20induced%20by%20secondary%20electron%20emission%20in%20capacitive%20oxygen%20discharges.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E28%3C%5C%2Fi%3E%285%29%2C%20055007.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab17ae%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab17ae%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D73P6YI7X%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Disruption%20of%20self-organized%20striated%20structure%20induced%20by%20secondary%20electron%20emission%20in%20capacitive%20oxygen%20discharges%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22De-Qi%22%2C%22lastName%22%3A%22Wen%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Quan-Zhi%22%2C%22lastName%22%3A%22Zhang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yuan-Hong%22%2C%22lastName%22%3A%22Song%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Yu-Ru%22%2C%22lastName%22%3A%22Zhang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22You-Nian%22%2C%22lastName%22%3A%22Wang%22%7D%5D%2C%22abstractNote%22%3A%22Self-organized%20striated%20structure%20has%20been%20observed%20experimentally%20and%20numerically%20in%20CF4%20plasmas%20in%20radio-frequency%20capacitively%20coupled%20plasmas%20recently%20%28Liu%20et%20al%202016%20Phys.%20Rev.%20Lett.%20116%20255002%29.%20In%20this%20work%2C%20the%20striated%20structure%20is%20investigated%20in%20a%20capacitively%20coupled%20oxygen%20discharge%20with%20the%20introduction%20of%20the%20effect%20from%20the%20secondary%20electron%20emission%2C%20based%20on%20a%20particle-in-cell%5C%2FMonte%20Carlo%20collision%20model.%20As%20we%20know%2C%20the%20transport%20of%20positive%20and%20negative%20ions%20plays%20a%20key%20role%20in%20the%20formation%20of%20striations%20in%20electronegative%20gases%2C%20for%20which%2C%20the%20electronegativity%20needs%20to%20be%20large%20enough.%20As%20the%20secondary%20electron%20emission%20increases%2C%20electrons%20in%20the%20sheaths%20gradually%20contribute%20more%20ionization%20to%20the%20discharge.%20Meanwhile%2C%20the%20increase%20of%20the%20electron%20density%2C%20especially%20in%20the%20plasma%20bulk%2C%20leads%20to%20an%20increased%20electrical%20conductivity%20and%20a%20reduced%20bulk%20electric%20%5Cufb01eld%2C%20which%20would%20shield%20the%20ions%5Cu2019%20mobility.%20These%20changes%20result%20in%20enlarged%20striation%20gaps.%20And%20then%2C%20with%20more%20emitted%20electrons%2C%20obvious%20disruption%20of%20the%20striations%20is%20observed%20accompanied%20with%20a%20transition%20of%20electron%20heating%20mode.%20Due%20to%20the%20weakened%20%5Cufb01eld%2C%20the%20impact%20ionization%20in%20the%20plasma%20bulk%20is%20attenuated%2C%20compared%20with%20the%20enhanced%20ionization%20caused%20by%20secondary%20electrons.%20This%20would%20lead%20to%20the%20electron%20heating%20mode%20transition%20from%20striated%20%28STR%29%20mode%20to%20%5Cu03b3-mode.%20Besides%2C%20our%20investigation%20further%20reveals%20that%20%5Cu03b3-mode%20is%20more%20likely%20to%20dominate%20the%20discharge%20under%20high%20gas%20pressures%20or%20driving%20voltages.%22%2C%22date%22%3A%222019-05-13%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fab17ae%22%2C%22ISSN%22%3A%221361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fab17ae%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-18T05%3A38%3A23Z%22%7D%7D%5D%7D
Liu, J., Wang, X.-K., Wang, L., Zhao, K., Liu, Y., Song, Y., & Wang, Y. (2024). An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge. Plasma Processes and Polymers, e2300219. https://doi.org/10.1002/ppap.202300219 Cite
Tian, C.-B., Wang, L., Vass, M., Wang, X.-K., Dong, W., Song, Y.-H., Wang, Y.-N., & Schulze, J. (2024). The detachment-induced mode in electronegative capacitively coupled radio-frequency plasmas. Plasma Sources Science and Technology, 33(7), 075008. https://doi.org/10.1088/1361-6595/ad5df8 Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2023). Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges. Plasma Sources Science and Technology, 32(4), 045002. https://doi.org/10.1088/1361-6595/acc6e9 Cite
Vass, M., Wang, L., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2022). Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis. Plasma Sources Science and Technology, 31(11), 115004. https://doi.org/10.1088/1361-6595/ac9754 Cite
Wang, L., Vass, M., Lafleur, T., Donkó, Z., Song, Y.-H., & Schulze, J. (2022). On the validity of the classical plasma conductivity in capacitive RF discharges. Plasma Sources Science and Technology, 31(10), 105013. https://doi.org/10.1088/1361-6595/ac95c1 Cite
Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2022). Electropositive core in electronegative magnetized capacitive radio frequency plasmas. Plasma Sources Science and Technology, 31(6), 06LT01. https://doi.org/10.1088/1361-6595/ac5ec7 Cite
Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2021). Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges. Plasma Sources Science and Technology, 30(10), 10LT01. https://doi.org/10.1088/1361-6595/ac287b Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas. Plasma Sources Science and Technology, 30(8), 085011. https://doi.org/10.1088/1361-6595/abf206 Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms. Plasma Sources Science and Technology, 30(5), 054001. https://doi.org/10.1088/1361-6595/abf31d Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges. J. Vac. Sci. Technol. A, 39, 063004. https://doi.org/10.1116/6.0001327 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite
Wang L., De-Qi W., Chong-Biao T., Yuan-Hong S., You-Nian W., 大连理工大学物理学院, 大连 116024,School of Physics, Dalian University of Technology, Dalian 116024, China, 德国波鸿鲁尔大学电子工程与信息科学学院, 波鸿 D-44780,Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Bochum D-44780, Germany, & 美国密歇根州立大学电子与计算机工程学院, 东兰辛 48823,Department of Electrical and Computer Engineering, Michigan State University, East Lansing 48823, USA. (2021). Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica, 70(9), 095214–095214. https://doi.org/10.7498/aps.70.20210473 Cite
Wang, L., Wen, D.-Q., Hartmann, P., Donkó, Z., Derzsi, A., Wang, X.-F., Song, Y.-H., Wang, Y.-N., & Schulze, J. (2020). Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges. Plasma Sources Science and Technology, 29(10), 105004. https://doi.org/10.1088/1361-6595/abb2e7 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite
Wang, L., Wen, D.-Q., Zhang, Q.-Z., Song, Y.-H., Zhang, Y.-R., & Wang, Y.-N. (2019). Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges. Plasma Sources Science and Technology, 28(5), 055007. https://doi.org/10.1088/1361-6595/ab17ae Cite