Dr.-Ing. Birk Berger

Park, C.-W., Schulze, J., Berger, B., Chae, G.-S., Kim, J.-H., & Lee, H.-C. (2026). Plasma density measurement using phase-resolved optical emission spectroscopy in low-pressure capacitively coupled plasmas. Plasma Sources Science and Technology, 35(5), 05LT01. https://doi.org/10.1088/1361-6595/ae6c57 Cite

Azhar, M., Neuroth, C., Hamdan, A. A., Zhang, L. Y., Berger, B., Wang, L., Zhang, Q.-Z., & Schulze, J. (2026). The effects of dielectric rods on streamer dynamics in patterned dielectric barrier discharges. Physics of Plasmas, 33(5), 052112. https://doi.org/10.1063/5.0325551 Cite

Neuroth, C., Berger, B., Wang, L., Azhar, M., Mujahid, Z.-I., Ryppa, M., Zhang, Q.-Z., & Schulze, J. (2026). n-Butane conversion in patterned dielectric barrier discharges using helium carrier gas. Cite

Berger, B., Mujahid, Z., Neuroth, C., Azhar, M., Wang, L., Zhang, Q.-Z., Mussenbrock, T., Korolov, I., & Schulze, J. (2024). The effects of different pellet shapes on streamer dynamics in patterned dielectric barrier discharges. Plasma Sources Science and Technology, 33(12), 125011. https://doi.org/10.1088/1361-6595/ad9b4b Cite

Neuroth, C., Mujahid, Z., Berger, B., Oberste-Beulmann, C., Oppotsch, T., Zhang, Q.-Z., Muhler, M., Mussenbrock, T., Korolov, I., & Schulze, J. (2023). The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges. Plasma Sources Science and Technology, 32(10), 105019. https://doi.org/10.1088/1361-6595/ad0323 Cite

Eremin, D., Engel, D., Krüger, D., Wilczek, S., Berger, B., Oberberg, M., Wölfel, C., Smolyakov, A., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode. Plasma Sources Science and Technology, 32(4), 045007. https://doi.org/10.1088/1361-6595/acc481 Cite

Eremin, D., Berger, B., Engel, D., Kallähn, J., Köhn, K., Krüger, D., Xu, L., Oberberg, M., Wölfel, C., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code. Plasma Sources Science and Technology, 32(4), 045008. https://doi.org/10.1088/1361-6595/acc47f Cite

Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., Brinkmann, R. P., & Schulze, J. (2023). Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results. Plasma Sources Science and Technology, 32(4), 045009. https://doi.org/10.1088/1361-6595/acc480 Cite

Roggendorf, J., Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., & Schulze, J. (2022). Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes. Plasma Sources Science and Technology, 31(6), 065007. https://doi.org/10.1088/1361-6595/ac7413 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control, 16, 100142. https://doi.org/10.1016/j.ifacsc.2021.100142 Cite

Liu, Y., Trieschmann, J., Berger, B., Schulze, J., & Mussenbrock, T. (2021). Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field. Physics of Plasmas, 28(5), 053505. https://doi.org/10.1063/5.0045947 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. Cite

Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite

Oberberg, M., Berger, B., Buschheuer, M., Engel, D., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2020). The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O ₂. Plasma Sources Science and Technology, 29(7), 075013. https://doi.org/10.1088/1361-6595/ab9b31 Cite

Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite

Oberberg, M., Engel, D., Berger, B., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2019). Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge. Plasma Sources Science and Technology, 28(11), 115021. https://doi.org/10.1088/1361-6595/ab53a0 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Awakowicz, P., Lunze, J., & Schulze, J. (2019). The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition. Journal of Instrumentation, 14(10), P10007–P10007. https://doi.org/10.1088/1748-0221/14/10/P10007 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Awakowicz, P., Lunze, J., & Schulze, J. (2019). The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition. Journal of Instrumentation, 14(10), P10007–P10007. https://doi.org/10.1088/1748-0221/14/10/P10007 Cite

Brandt, S., Berger, B., Donkó, Z., Derzsi, A., Schüngel, E., Koepke, M., & Schulze, J. (2019). Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF ₄. Plasma Sources Science and Technology, 28(9), 095021. https://doi.org/10.1088/1361-6595/ab3c7c Cite

Daksha, M., Derzsi, A., Zaka-ul-Islam, M., Schulenberg, D., Berger, B., Donkó, Z., & Schulze, J. (2019). Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas. Plasma Sources Science and Technology, 28(3), 034002. https://doi.org/10.1088/1361-6595/ab094f Cite

Berger, B., You, K., Lee, H.-C., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2018). Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas. Plasma Sources Science and Technology, 27(12), 12LT02. https://doi.org/10.1088/1361-6595/aaefc7 Cite

Donkó, Z., Derzsi, A., Korolov, I., Hartmann, P., Brandt, S., Schulze, J., Berger, B., Koepke, M., Bruneau, B., Johnson, E., Lafleur, T., Booth, J.-P., Gibson, A. R., O’Connell, D., & Gans, T. (2018). Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. Plasma Physics and Controlled Fusion, 60(1), 014010. https://doi.org/10.1088/1361-6587/aa8378 Cite

Berger, B., SteinBerger, T., Schüngel, E., Koepke, M., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2017). Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase. Applied Physics Letters, 111(20), 201601. https://doi.org/10.1063/1.5000144 Cite

Brandt, S., Berger, B., Schüngel, E., Korolov, I., Derzsi, A., Bruneau, B., Johnson, E., Lafleur, T., O’Connell, D., Koepke, M., Gans, T., Booth, J.-P., Donkó, Z., & Schulze, J. (2016). Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF ₄. Plasma Sources Science and Technology, 25(4), 045015. https://doi.org/10.1088/0963-0252/25/4/045015 Cite

Daksha, M., Berger, B., Schuengel, E., Korolov, I., Derzsi, A., Koepke, M., Donkó, Z., & Schulze, J. (2016). A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas. Journal of Physics D: Applied Physics, 49(23), 234001. https://doi.org/10.1088/0022-3727/49/23/234001 Cite

Berger, B., Brandt, S., Franek, J., Schüngel, E., Koepke, M., Mussenbrock, T., & Schulze, J. (2015). Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms. Journal of Applied Physics, 118(22), 223302. https://doi.org/10.1063/1.4937403 Cite

Franek, J., Brandt, S., Berger, B., Liese, M., Barthel, M., Schüngel, E., & Schulze, J. (2015). Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms. Review of Scientific Instruments, 86(5), 053504. https://doi.org/10.1063/1.4921399 Cite