Prof. Dr. Julian Schulze

Dong, W., Song, L., Zhang, Y., Wang, L., Song, Y., & Schulze, J. (2025). Multiscale Simulation of Capacitively Coupled Ar/CHF₃ Discharges Driven by Sawtooth‐Tailored Voltage Waveforms. Plasma Processes and Polymers, e70026. https://doi.org/10.1002/ppap.70026 Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2025). Plasma uniformity control in capacitive RF discharges by an individually RF driven sidewall electrode. Plasma Sources Science and Technology, 34(4), 045004. https://doi.org/10.1088/1361-6595/adc504 Cite

Klich, M., Schulenberg, D., Wilczek, S., Vass, M., Bolles, T., Korolov, I., Schulze, J., Mussenbrock, T., & Brinkmann, R. P. (2025). Electron dynamics of three distinct discharge modes of a cross-field atmospheric pressure plasma jet. Plasma Sources Science and Technology, 34(4), 045012. https://doi.org/10.1088/1361-6595/adc7d8 Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2025). Plasma uniformity control in capacitive RF discharges by an individually RF driven sidewall electrode. Plasma Sources Science and Technology, 34(4), 045004. https://doi.org/10.1088/1361-6595/adc504 Cite

Masheyeva, R., Vass, M., Myrzaly, M., Tian, C.-B., Dzhumagulova, K., Schulze, J., Donkó, Z., & Hartmann, P. (2025). Experimental and numerical study of the ionization-attachment instability in an O₂ capacitively coupled radio frequency plasma. Plasma Sources Science and Technology, 34(4), 045017. https://doi.org/10.1088/1361-6595/adcb6b Cite

Beckfeld, F., Masheyeva, R., Derzsi, A., Schulenberg, D. A., Korolov, I., Bock, C., Schulze, J., & Donkó, Z. (2025). Effective secondary electron yields for different surface materials in capacitively coupled plasmas. Plasma Sources Science and Technology, 34(3), 035009. https://doi.org/10.1088/1361-6595/adb885 Cite

Beckfeld, F., Janssen, M., Neuroth, C., Korolov, I., & Schulze, J. (2025). Fiber PROES: Phase resolved optical emission spectroscopy via optical fibers for knowledge-based plasma process development and monitoring. Review of Scientific Instruments, 96(3), 033507. https://doi.org/10.1063/5.0244243 Cite

Wen, H., Schulze, J., Fu, Y., Sun, J.-Y., & Zhang, Q.-Z. (2025). Similarity laws of low pressure inductively coupled discharges based on PIC/MCC simulations. Plasma Sources Science and Technology, 34(3), 03LT01. https://doi.org/10.1088/1361-6595/adbb19 Cite

Ma, F.-F., Zhang, Q.-Z., Schulze, J., Cui, Y.-M., & Wang, Y.-N. (2025). Extensive adjustment of magnetic field on plasma density and ion incidence angle in radio frequency discharge. Plasma Sources Science and Technology, 34(2), 025006. https://doi.org/10.1088/1361-6595/adb20d Cite

Dong, W., Gao, Z.-Y., Wang, L., Zhang, M.-J., Tian, C.-B., Liu, Y.-X., Song, Y.-H., & Schulze, J. (2025). Electron dynamics and particle transport in capacitively coupled Ar/O₂ discharges driven by sawtooth up voltage waveforms. Plasma Sources Science and Technology, 34(2), 025008. https://doi.org/10.1088/1361-6595/adab91 Cite

Yu, S., Wang, Y., Chen, Z., Wang, Z., Wang, L., Jiang, W., Schulze, J., & Zhang, Y. (2025). Impedance matching assistance based on frequency modulation for capacitively coupled plasmas. Journal of Applied Physics, 137(3), 033301. https://doi.org/10.1063/5.0226790 Cite

Nesterenko, I., Kalas, B., Dao, T. D., Schulze, J., & Andrianov, N. (2025). Mechanism of selective SiO2/photoresist reactive ion etching in an inductively coupled plasma operated in a C4F8/H2 gas mixture. Applied Physics Letters, 126(3), 031603. https://doi.org/10.1063/5.0238676 Cite

Ohtsu, Y., Tabaru, T., & Schulze, J. (2025). Impact of inductively coupled plasma injection on capacitively coupled plasma with a ring-shaped hollow cathode using methane and hydrogen mixture gases. Vacuum, 237, 114159. https://doi.org/10.1016/j.vacuum.2025.114159 Cite

Berger, B., Mujahid, Z., Neuroth, C., Azhar, M., Wang, L., Zhang, Q.-Z., Mussenbrock, T., Korolov, I., & Schulze, J. (2024). The effects of different pellet shapes on streamer dynamics in patterned dielectric barrier discharges. Plasma Sources Science and Technology, 33(12), 125011. https://doi.org/10.1088/1361-6595/ad9b4b Cite

Vass, M., Schulenberg, D., Donkó, Z., Hartmann, P., Steuer, D., Böke, M., Schulz-von Der Gathen, V., Korolov, I., Mussenbrock, T., & Schulze, J. (2024). Energy efficiency of reactive species generation in radio frequency atmospheric pressure plasma jets driven by tailored voltage waveforms in a He/O₂ mixture. Plasma Sources Science and Technology, 33(11), 11LT01. https://doi.org/10.1088/1361-6595/ad8ae7 Cite

Wang, X.-K., Masheyeva, R., Liu, Y.-X., Song, Y.-H., Hartmann, P., Donkó, Z., & Schulze, J. (2024). Energy efficient F atom generation and control in CF₄ capacitively coupled plasmas driven by tailored voltage waveforms. Plasma Sources Science and Technology, 33(8), 085006. https://doi.org/10.1088/1361-6595/ad69c0 Cite

Wang, X.-K., Korolov, I., Wilczek, S., Masheyeva, R., Liu, Y.-X., Song, Y.-H., Hartmann, P., Donkó, Z., & Schulze, J. (2024). Hysteresis in radio frequency capacitively coupled CF₄ plasmas. Plasma Sources Science and Technology, 33(8), 085001. https://doi.org/10.1088/1361-6595/ad5eb9 Cite

Tian, C.-B., Wang, L., Vass, M., Wang, X.-K., Dong, W., Song, Y.-H., Wang, Y.-N., & Schulze, J. (2024). The detachment-induced mode in electronegative capacitively coupled radio-frequency plasmas. Plasma Sources Science and Technology, 33(7), 075008. https://doi.org/10.1088/1361-6595/ad5df8 Cite

Yu, S., Wu, H., Yang, S., Wang, L., Chen, Z., Wang, Z., Jiang, W., Schulze, J., & Zhang, Y. (2024). Kinetic simulations of capacitively coupled plasmas driven by tailored voltage waveforms with multi-frequency matching. Plasma Sources Science and Technology, 33(7), 075003. https://doi.org/10.1088/1361-6595/ad5df7 Cite

Ohtsu, Y., Tabaru, T., & Schulze, J. (2024). Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas. Journal of Vacuum Science & Technology B, 42(4), 044204. https://doi.org/10.1116/5.0213602 Cite

Ohtsu, Y., Uchida, T., Kuno, R., & Schulze, J. (2024). Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets. Journal of Vacuum Science & Technology A, 42(3), 033011. https://doi.org/10.1116/6.0003448 Cite

Masheyeva, R., Vass, M., Wang, X.-K., Liu, Y.-X., Derzsi, A., Hartmann, P., Schulze, J., & Donkó, Z. (2024). Electron power absorption in CF ₄ capacitively coupled RF plasmas operated in the striation mode. Plasma Sources Science and Technology, 33(4), 045019. https://doi.org/10.1088/1361-6595/ad3c69 Cite

Chen, Z., Wang, H., Yu, S., Wang, Y., Chen, Z., Jiang, W., Schulze, J., & Zhang, Y. (2024). Electrical characteristics of the GEC reference cell at low pressure: a two-dimensional PIC/MCC modeling study. Plasma Sources Science and Technology, 33(4), 045003. https://doi.org/10.1088/1361-6595/ad3849 Cite

Tian, P., Kenney, J., Rauf, S., Korolov, I., & Schulze, J. (2024). Uniformity of low-pressure capacitively coupled plasmas: Experiments and two-dimensional particle-in-cell simulations. Physics of Plasmas, 31(4), 043507. https://doi.org/10.1063/5.0178911 Cite

Shi, D.-H., Wang, X.-K., Liu, Y.-X., Donkó, Z., Schulze, J., & Wang, Y.-N. (2024). An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes. Plasma Sources Science and Technology, 33(2), 025012. https://doi.org/10.1088/1361-6595/ad257f Cite

Dong, W., Zhang, Y.-F., Schulze, J., & Song, Y.-H. (2024). Hybrid simulation of instabilities in capacitively coupled RF CF ₄ /Ar plasmas driven by a dual frequency source. Plasma Sources Science and Technology, 33(2), 025020. https://doi.org/10.1088/1361-6595/ad270e Cite

Schulenberg, D. A., Vass, M., Klich, M., Donkó, Z., Klotz, J., Bibinov, N., Mussenbrock, T., & Schulze, J. (2024). Mode Transition Induced by Gas Heating Along the Discharge Channel in Capacitively Coupled Atmospheric Pressure Micro Plasma Jets. Plasma Chemistry and Plasma Processing. https://doi.org/10.1007/s11090-023-10444-6 Cite

Vass, M., Schulenberg, D., Donkó, Z., Korolov, I., Hartmann, P., Schulze, J., & Mussenbrock, T. (2024). A new 2D fluid-MC hybrid approach for simulating nonequilibrium atmospheric pressure plasmas: density distribution of atomic oxygen in radio-frequency plasma jets in He/O ₂ mixtures. Plasma Sources Science and Technology, 33(1), 015012. https://doi.org/10.1088/1361-6595/ad1f37 Cite

Islam, M. H., Uchida, T., Schulze, J., & Ohtsu, Y. (2024). Effect of multi-cusp magnetic fields to generate a high-density hydrogen plasma inside a low pressure H2 cylindrical hollow cathode discharge. Vacuum, 227, 113459. https://doi.org/10.1016/j.vacuum.2024.113459 Cite

Sun, J.-Y., Gao, F., Zhou, F.-J., Schulze, J., & Wang, Y.-N. (2024). Enhancement of Harmonic Heating by Magnetized Plasma Series Resonance in Capacitive Radio Frequency Discharges. PHYSICAL REVIEW LETTERS. Cite

Schleitzer, J., Schneider, V., Korolov, I., Hübner, G., Hartmann, P., Schulze, J., & Kersten, H. (2024). Langmuir Probe Measurements in a Dual-Frequency Capacitively Coupled rf Discharge. IEEE Transactions on Plasma Science, 1–12. https://doi.org/10.1109/TPS.2024.3375520 Cite

Zhou, Y., Zhao, K., Ma, F.-F., Liu, Y.-X., Gao, F., Schulze, J., & Wang, Y.-N. (2024). Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources. Applied Physics Letters. Cite

Sun, J.-Y., Schulze, J., Ma, F.-F., Zhang, Q.-Z., & Wang, Y.-N. (2023). Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges. Physics of Plasmas, 30(12), 120702. https://doi.org/10.1063/5.0175060 Cite

Luo, H., Kenney, J., Rauf, S., Korolov, I., & Schulze, J. (2023). Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge. Plasma Sources Science and Technology, 32(11), 115018. https://doi.org/10.1088/1361-6595/ad0d06 Cite

Park, C.-W., Horváth, B., Derzsi, A., Schulze, J., Kim, J. H., Donkó, Z., & Lee, H.-C. (2023). Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas. Plasma Sources Science and Technology, 32(11), 115003. https://doi.org/10.1088/1361-6595/ad0432 Cite

Neuroth, C., Mujahid, Z., Berger, B., Oberste-Beulmann, C., Oppotsch, T., Zhang, Q.-Z., Muhler, M., Mussenbrock, T., Korolov, I., & Schulze, J. (2023). The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges. Plasma Sources Science and Technology, 32(10), 105019. https://doi.org/10.1088/1361-6595/ad0323 Cite

Ohtsu, Y., Hiwatashi, H., & Schulze, J. (2023). Spatial distributions of the ion flux in a capacitive hydrogen RF discharge using a hollow cathode with double toroidal grooves enclosed by magnets. Japanese Journal of Applied Physics, 62(SL), SL1017. https://doi.org/10.35848/1347-4065/acdb7f Cite

Wang, Y., Yan, H., Bai, X., Li, T., Schulze, J., Wang, X., Song, J., & Zhang, Q. (2023). Effect of airflow on the discharge uniformity at different cycles in the repetitive unipolar nanosecond‐pulsed dielectric barrier discharge. Plasma Processes and Polymers, e2300076. https://doi.org/10.1002/ppap.202300076 Cite

Wang, X.-K., Masheyeva, R., Liu, Y.-X., Hartmann, P., Schulze, J., & Donkó, Z. (2023). The electrical asymmetry effect in electronegative CF ₄ capacitive RF plasmas operated in the striation mode. Plasma Sources Science and Technology, 32(8), 085009. https://doi.org/10.1088/1361-6595/acec96 Cite

Nösges, K., Klich, M., Derzsi, A., Horváth, B., Schulze, J., Brinkmann, R. P., Mussenbrock, T., & Wilczek, S. (2023). Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 32(8), 085008. https://doi.org/10.1088/1361-6595/ace848 Cite

Sun, J.-Y., Zhang, Q.-Z., Schulze, J., & Wang, Y.-N. (2023). Resonant electron confinement and sheath expansion heating in magnetized capacitive oxygen discharges. Plasma Sources Science and Technology, 32(7), 075003. https://doi.org/10.1088/1361-6595/ace1a5 Cite

Ohtsu, Y., Hara, K., Imoto, S., Schulze, J., Yasunaga, T., & Ikegami, Y. (2023). Spatial structures of rf ring-shaped magnetized sputtering plasmas with two facing cylindrical ZnO/Al ₂ O ₃ targets. Japanese Journal of Applied Physics, 62(SI), SI1007. https://doi.org/10.35848/1347-4065/acc7aa Cite

Donkó, Z., Hartmann, P., Korolov, I., Schulenberg, D., Rohr, S., Rauf, S., & Schulze, J. (2023). Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge. Plasma Sources Science and Technology, 32(6), 065002. https://doi.org/10.1088/1361-6595/acd6b5 Cite

Eremin, D., Engel, D., Krüger, D., Wilczek, S., Berger, B., Oberberg, M., Wölfel, C., Smolyakov, A., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode. Plasma Sources Science and Technology, 32(4), 045007. https://doi.org/10.1088/1361-6595/acc481 Cite

Eremin, D., Berger, B., Engel, D., Kallähn, J., Köhn, K., Krüger, D., Xu, L., Oberberg, M., Wölfel, C., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code. Plasma Sources Science and Technology, 32(4), 045008. https://doi.org/10.1088/1361-6595/acc47f Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2023). Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges. Plasma Sources Science and Technology, 32(4), 045002. https://doi.org/10.1088/1361-6595/acc6e9 Cite

Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., Brinkmann, R. P., & Schulze, J. (2023). Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results. Plasma Sources Science and Technology, 32(4), 045009. https://doi.org/10.1088/1361-6595/acc480 Cite

Rauf, S., Schroeder, M., Korolov, I., Kenney, J., & Schulze, J. (2023). Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform. Plasma Sources Science and Technology, 32(3), 034002. https://doi.org/10.1088/1361-6595/acc12d Cite

Hartmann, P., Korolov, I., Escandón-López, J., van Gennip, W., Buskes, K., & Schulze, J. (2023). Control of ion flux-energy distribution at dielectric wafer surfaces by low frequency tailored voltage waveforms in capacitively coupled plasmas. Journal of Physics D: Applied Physics, 56(5), 055202. https://doi.org/10.1088/1361-6463/acacaa Cite

Liu, Y., Vass, M., Hübner, G., Schulenberg, D., Hemke, T., Bischoff, L., Chur, S., Steuer, D., Golda, J., Böke, M., Schulze, J., Korolov, I., & Mussenbrock, T. (2023). Local enhancement of electron heating and neutral species generation in radio-frequency micro-atmospheric pressure plasma jets: the effects of structured electrode topologies. Plasma Sources Science and Technology, 32(2), 025012. https://doi.org/10.1088/1361-6595/acb9b8 Cite