Researcher
Address
Ruhr-Universität Bochum
Fakultät für Elektrotechnik und Informationstechnik
Angewandte Elektrodynamik und Plasmatechnik
Universitätsstraße 150
D-44801 Bochum, Germany
Room
ID 1/533
Phone
+49 234 32 29478
Email
noesges(at)aept.rub.de
Publikationen
2825793
Nösges
apa
50
date
desc
year
1
Nösges
432
https://www.aept.ruhr-uni-bochum.de/wp-content/plugins/zotpress/
%7B%22status%22%3A%22success%22%2C%22updateneeded%22%3Afalse%2C%22instance%22%3A%22zotpress-eb42c7e6fe62e4e2604af137a73ab401%22%2C%22meta%22%3A%7B%22request_last%22%3A0%2C%22request_next%22%3A0%2C%22used_cache%22%3Atrue%7D%2C%22data%22%3A%5B%7B%22key%22%3A%22X8URJTDA%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22N%5Cu00f6sges%20et%20al.%22%2C%22parsedDate%22%3A%222023-08-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EN%26%23xF6%3Bsges%2C%20K.%2C%20Klich%2C%20M.%2C%20Derzsi%2C%20A.%2C%20Horv%26%23xE1%3Bth%2C%20B.%2C%20Schulze%2C%20J.%2C%20Brinkmann%2C%20R.%20P.%2C%20Mussenbrock%2C%20T.%2C%20%26amp%3B%20Wilczek%2C%20S.%20%282023%29.%20Nonlocal%20dynamics%20of%20secondary%20electrons%20in%20capacitively%20coupled%20radio%20frequency%20discharges.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E32%3C%5C%2Fi%3E%288%29%2C%20085008.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Face848%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Face848%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DX8URJTDA%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Nonlocal%20dynamics%20of%20secondary%20electrons%20in%20capacitively%20coupled%20radio%20frequency%20discharges%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22K%22%2C%22lastName%22%3A%22N%5Cu00f6sges%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22M%22%2C%22lastName%22%3A%22Klich%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22A%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22B%22%2C%22lastName%22%3A%22Horv%5Cu00e1th%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22J%22%2C%22lastName%22%3A%22Schulze%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22R%20P%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22T%22%2C%22lastName%22%3A%22Mussenbrock%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22S%22%2C%22lastName%22%3A%22Wilczek%22%7D%5D%2C%22abstractNote%22%3A%22In%20capacitively%20coupled%20radio%20frequency%20discharges%2C%20the%20interaction%20of%20the%20plasma%20and%20the%20surface%20boundaries%20is%20linked%20to%20a%20variety%20of%20highly%20relevant%20phenomena%20for%20technological%20processes.%20One%20possible%20plasma-surface%20interaction%20is%20the%20generation%20of%20secondary%20electrons%20%28SEs%29%2C%20which%20significantly%20influence%20the%20discharge%20when%20accelerated%20in%20the%20sheath%20electric%20field.%20However%2C%20SEs%2C%20in%20particular%20electron-induced%20SEs%20%28%5Cu03b4-electrons%29%2C%20are%20frequently%20neglected%20in%20theory%20and%20simulations.%20Due%20to%20the%20relatively%20high%20threshold%20energy%20for%20the%20effective%20generation%20of%20%5Cu03b4-electrons%20at%20surfaces%2C%20their%20dynamics%20are%20closely%20connected%20and%20entangled%20with%20the%20dynamics%20of%20the%20ion-induced%20SEs%20%28%5Cu03b3-electrons%29.%20Thus%2C%20a%20fundamental%20understanding%20of%20the%20electron%20dynamics%20has%20to%20be%20achieved%20on%20a%20nanosecond%20timescale%2C%20and%20the%20effects%20of%20the%20different%20electron%20groups%20have%20to%20be%20segregated.%20This%20work%20utilizes%201d3v%20particle-in-cell%5C%2FMonte%20Carlo%20collisions%20simulations%20of%20a%20symmetric%20discharge%20in%20the%20low-pressure%20regime%20%28p%20%3D%201%20Pa%29%20with%20the%20inclusion%20of%20realistic%20electron-surface%20interactions%20for%20silicon%20dioxide.%20A%20diagnostic%20framework%20is%20introduced%20that%20segregates%20the%20electrons%20into%20three%20groups%20%28%5Cu2018bulk-electrons%5Cu2019%2C%20%5Cu2018%5Cu03b3-electrons%5Cu2019%2C%20and%20%5Cu2018%5Cu03b4-electrons%5Cu2019%29%20in%20order%20to%20analyze%20and%20discuss%20their%20dynamics.%20A%20variation%20of%20the%20electrode%20gap%20size%20Lgap%20is%20then%20presented%20as%20a%20control%20tool%20to%20alter%20the%20dynamics%20of%20the%20discharge%20significantly.%20It%20is%20demonstrated%20that%20this%20control%20results%20in%20two%20different%20regimes%20of%20low%20and%20high%20plasma%20density%2C%20respectively.%20The%20fundamental%20electron%20dynamics%20of%20both%20regimes%20are%20explained%2C%20which%20requires%20a%20complete%20analysis%20starting%20at%20global%20parameters%20%28e.g.%20densities%29%20down%20to%20single%20electron%20trajectories.%22%2C%22date%22%3A%222023-08-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Face848%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Face848%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222023-08-16T17%3A47%3A15Z%22%7D%7D%2C%7B%22key%22%3A%22WBLI6F4T%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22lastModifiedByUser%22%3A%7B%22id%22%3A7499565%2C%22username%22%3A%22manuel.schroeder.rub%22%2C%22name%22%3A%22%22%2C%22links%22%3A%7B%22alternate%22%3A%7B%22href%22%3A%22https%3A%5C%2F%5C%2Fwww.zotero.org%5C%2Fmanuel.schroeder.rub%22%2C%22type%22%3A%22text%5C%2Fhtml%22%7D%7D%7D%2C%22creatorSummary%22%3A%22Hartmann%20et%20al.%22%2C%22parsedDate%22%3A%222021%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EHartmann%2C%20P.%2C%20Wang%2C%20L.%2C%20N%26%23xF6%3Bsges%2C%20K.%2C%20Berger%2C%20B.%2C%20Wilczek%2C%20S.%2C%20Brinkmann%2C%20R.%20P.%2C%20Mussenbrock%2C%20T.%2C%20Juhasz%2C%20Z.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Derzsi%2C%20A.%2C%20Lee%2C%20E.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282021%29.%20Control%20of%20electron%20velocity%20distributions%20at%20the%20wafer%20by%20tailored%20voltage%20waveforms%20in%20capacitively%20coupled%20plasmas%20to%20compensate%20surface%20charging%20in%20high-aspect%20ratio%20etch%20features.%20%3Ci%3EJournal%20of%20Physics%20D%3A%20Applied%20Physics%3C%5C%2Fi%3E%2C%20%3Ci%3E54%3C%5C%2Fi%3E%2C%20255202.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6463%5C%2Fabf229%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6463%5C%2Fabf229%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DWBLI6F4T%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Control%20of%20electron%20velocity%20distributions%20at%20the%20wafer%20by%20tailored%20voltage%20waveforms%20in%20capacitively%20coupled%20plasmas%20to%20compensate%20surface%20charging%20in%20high-aspect%20ratio%20etch%20features%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22P%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22K%22%2C%22lastName%22%3A%22N%5Cu00f6sges%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22B%22%2C%22lastName%22%3A%22Berger%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22S%22%2C%22lastName%22%3A%22Wilczek%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22R%20P%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22T%22%2C%22lastName%22%3A%22Mussenbrock%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Juhasz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22A%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Eunwoo%22%2C%22lastName%22%3A%22Lee%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22%22%2C%22date%22%3A%222021%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%22%22%2C%22ISSN%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6463%5C%2Fabf229%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-18T08%3A55%3A12Z%22%7D%7D%2C%7B%22key%22%3A%225XVIUJNV%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Hartmann%20et%20al.%22%2C%22parsedDate%22%3A%222020-07-29%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EHartmann%2C%20P.%2C%20Wang%2C%20L.%2C%20N%26%23xF6%3Bsges%2C%20K.%2C%20Berger%2C%20B.%2C%20Wilczek%2C%20S.%2C%20Brinkmann%2C%20R.%20P.%2C%20Mussenbrock%2C%20T.%2C%20Juhasz%2C%20Z.%2C%20Donk%26%23xF3%3B%2C%20Z.%2C%20Derzsi%2C%20A.%2C%20Lee%2C%20E.%2C%20%26amp%3B%20Schulze%2C%20J.%20%282020%29.%20Charged%20particle%20dynamics%20and%20distribution%20functions%20in%20low%20pressure%20dual-frequency%20capacitively%20coupled%20plasmas%20operated%20at%20low%20frequencies%20and%20high%20voltages.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E54%3C%5C%2Fi%3E%2C%20075014.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9374%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9374%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3D5XVIUJNV%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Charged%20particle%20dynamics%20and%20distribution%20functions%20in%20low%20pressure%20dual-frequency%20capacitively%20coupled%20plasmas%20operated%20at%20low%20frequencies%20and%20high%20voltages%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22P%22%2C%22lastName%22%3A%22Hartmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Li%22%2C%22lastName%22%3A%22Wang%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22K%22%2C%22lastName%22%3A%22N%5Cu00f6sges%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22B%22%2C%22lastName%22%3A%22Berger%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22S%22%2C%22lastName%22%3A%22Wilczek%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22R%20P%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22T%22%2C%22lastName%22%3A%22Mussenbrock%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Juhasz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Z%22%2C%22lastName%22%3A%22Donk%5Cu00f3%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22A%22%2C%22lastName%22%3A%22Derzsi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Eunwoo%22%2C%22lastName%22%3A%22Lee%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Julian%22%2C%22lastName%22%3A%22Schulze%22%7D%5D%2C%22abstractNote%22%3A%22%22%2C%22date%22%3A%222020-07-29%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fab9374%22%2C%22ISSN%22%3A%221361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9374%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222022-07-06T16%3A16%3A59Z%22%7D%7D%5D%7D
Nösges, K., Klich, M., Derzsi, A., Horváth, B., Schulze, J., Brinkmann, R. P., Mussenbrock, T., & Wilczek, S. (2023). Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 32(8), 085008. https://doi.org/10.1088/1361-6595/ace848 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite