Senior Researcher
Address
Ruhr-Universität Bochum
Fakultät für Elektrotechnik und Informationstechnik
Angewandte Elektrodynamik und Plasmatechnik
Universitätsstraße 150
D-44801 Bochum, Germany
Room
ID 2/509
Phone
+49 234 32 24094
Email
stefanovic(at)aept.rub.de
Publikationen
2825793
Stefanović
apa
50
date
desc
year
1
Stefanović
391
https://www.aept.ruhr-uni-bochum.de/wp-content/plugins/zotpress/
%7B%22status%22%3A%22success%22%2C%22updateneeded%22%3Afalse%2C%22instance%22%3A%22zotpress-2dcfd9dc2604a93eb322f3ea1b140817%22%2C%22meta%22%3A%7B%22request_last%22%3A0%2C%22request_next%22%3A0%2C%22used_cache%22%3Atrue%7D%2C%22data%22%3A%5B%7B%22key%22%3A%22YN6T5ISZ%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Klute%20et%20al.%22%2C%22parsedDate%22%3A%222021-06-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EKlute%2C%20M.%2C%20Kemaneci%2C%20E.%2C%20Porteanu%2C%20H.-E.%2C%20Stefanovi%26%23x107%3B%2C%20I.%2C%20Heinrich%2C%20W.%2C%20Awakowicz%2C%20P.%2C%20%26amp%3B%20Brinkmann%2C%20R.%20P.%20%282021%29.%20Modelling%20of%20a%20miniature%20microwave%20driven%20nitrogen%20plasma%20jet%20and%20comparison%20to%20measurements.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E30%3C%5C%2Fi%3E%286%29%2C%20065014.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac04bc%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fac04bc%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DYN6T5ISZ%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Modelling%20of%20a%20miniature%20microwave%20driven%20nitrogen%20plasma%20jet%20and%20comparison%20to%20measurements%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Michael%22%2C%22lastName%22%3A%22Klute%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Efe%22%2C%22lastName%22%3A%22Kemaneci%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Horia-Eugen%22%2C%22lastName%22%3A%22Porteanu%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ilija%22%2C%22lastName%22%3A%22Stefanovi%5Cu0107%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Wolfgang%22%2C%22lastName%22%3A%22Heinrich%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ralf%20Peter%22%2C%22lastName%22%3A%22Brinkmann%22%7D%5D%2C%22abstractNote%22%3A%22The%20MMWICP%20%28miniature%20microwave%20ICP%29%20is%20a%20new%20plasma%20source%20using%20the%20induction%20principle.%20Recently%20Klute%20et%20al%20presented%20a%20mathematical%20model%20for%20the%20electromagnetic%20fields%20and%20power%20balance%20of%20the%20new%20device.%20In%20this%20work%20the%20electromagnetic%20model%20is%20coupled%20with%20a%20global%20chemistry%20model%20for%20nitrogen%2C%20based%20on%20the%20chemical%20reaction%20set%20of%20Thorsteinsson%20and%20Gudmundsson%20and%20customized%20for%20the%20geometry%20of%20the%20MMWICP.%20The%20combined%20model%20delivers%20a%20quantitative%20description%20for%20a%20non-thermal%20plasma%20at%20a%20pressure%20of%20p%20%3D%201000%20Pa%20and%20a%20gas%20temperature%20of%20Tg%20%3D%20650%5Cu20131600%20K.%20Comparison%20with%20published%20experimental%20data%20shows%20a%20good%20agreement%20for%20the%20volume%20averaged%20plasma%20parameters%20at%20high%20power%2C%20for%20the%20spatial%20distribution%20of%20the%20discharge%20and%20for%20the%20microwave%20measurements.%20Furthermore%2C%20the%20balance%20of%20capacitive%20and%20inductive%20coupling%20in%20the%20absorbed%20power%20is%20analyzed.%20This%20leads%20to%20the%20interpretation%20of%20the%20discharge%20regime%20at%20an%20electron%20density%20of%20ne%20%5Cu2248%206.4%20%5Cu00d7%201018%20m%5Cu22123%20as%20E%5C%2FH-hybridmode%20with%20an%20capacitive%20and%20inductive%20component.%22%2C%22date%22%3A%222021-06-01%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fac04bc%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fac04bc%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-19T14%3A31%3A09Z%22%7D%7D%2C%7B%22key%22%3A%22TW4SGES3%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Klute%20et%20al.%22%2C%22parsedDate%22%3A%222020-06-30%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EKlute%2C%20M.%2C%20Porteanu%2C%20H.-E.%2C%20Stefanovi%26%23x107%3B%2C%20I.%2C%20Heinrich%2C%20W.%2C%20Awakowicz%2C%20P.%2C%20%26amp%3B%20Brinkmann%2C%20R.%20P.%20%282020%29.%20Theoretical%20investigation%20of%20a%20miniature%20microwave%20driven%20plasma%20jet.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E29%3C%5C%2Fi%3E%286%29%2C%20065018.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9483%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9483%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DTW4SGES3%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Theoretical%20investigation%20of%20a%20miniature%20microwave%20driven%20plasma%20jet%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Michael%22%2C%22lastName%22%3A%22Klute%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Horia-Eugen%22%2C%22lastName%22%3A%22Porteanu%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ilija%22%2C%22lastName%22%3A%22Stefanovi%5Cu0107%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Wolfgang%22%2C%22lastName%22%3A%22Heinrich%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ralf%20Peter%22%2C%22lastName%22%3A%22Brinkmann%22%7D%5D%2C%22abstractNote%22%3A%22Radio%20frequency%20driven%20plasma%20jets%20are%20compact%20plasma%20sources%20which%20are%20used%20in%20many%20advanced%20fields%20such%20as%20surface%20engineering%20or%20biomedicine.%20The%20MMWICP%20%28miniature%20micro%20wave%20ICP%29%20is%20a%20particular%20variant%20of%20that%20device%20class.%20Unlike%20other%20plasma%20jets%20which%20employ%20capacitive%20coupling%2C%20the%20MMWICP%20uses%20the%20induction%20principle.%20The%20jet%20is%20integrated%20into%20a%20miniature%20cavity%20structure%20which%20realizes%20an%20LC-resonator%20with%20a%20high%20quality%20factor.%20When%20excited%20at%20its%20resonance%20frequency%2C%20the%20resonator%20develops%20a%20high%20internal%20current%20which%5Cu2014transferred%20to%20the%20plasma%20via%20induction%5Cu2014provides%20an%20efficient%20source%20of%20RF%20power.%20This%20work%20presents%20a%20theoretical%20model%20of%20the%20MMWICP.%20The%20possible%20operation%20points%20of%20the%20device%20are%20analyzed.%20Two%20different%20regimes%20can%20be%20identified%2C%20the%20capacitive%20E-mode%20with%20a%20plasma%20density%20of%20ne%20%5Cu2248%205%20%5Cu00d7%201017m%5Cu22123%2C%20and%20the%20inductive%20H-mode%20with%20densities%20of%20ne%201019m%5Cu22123.%20The%20E%20to%20H%20transition%20shows%20a%20pronounced%20hysteresis%20behavior.%22%2C%22date%22%3A%222020-06-30%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fab9483%22%2C%22ISSN%22%3A%221361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fab9483%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-19T14%3A31%3A07Z%22%7D%7D%2C%7B%22key%22%3A%22T9ZN7V3U%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Porteanu%20et%20al.%22%2C%22parsedDate%22%3A%222019-03-15%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EPorteanu%2C%20H.-E.%2C%20Stefanovi%26%23x107%3B%2C%20I.%2C%20Bibinov%2C%20N.%2C%20Klute%2C%20M.%2C%20Awakowicz%2C%20P.%2C%20Brinkmann%2C%20R.%20P.%2C%20%26amp%3B%20Heinrich%2C%20W.%20%282019%29.%20Correlated%20mode%20analysis%20of%20a%20microwave%20driven%20ICP%20source.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E28%3C%5C%2Fi%3E%283%29%2C%20035013.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab06a7%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fab06a7%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DT9ZN7V3U%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Correlated%20mode%20analysis%20of%20a%20microwave%20driven%20ICP%20source%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Horia-Eugen%22%2C%22lastName%22%3A%22Porteanu%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ilija%22%2C%22lastName%22%3A%22Stefanovi%5Cu0107%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Nikita%22%2C%22lastName%22%3A%22Bibinov%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Michael%22%2C%22lastName%22%3A%22Klute%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ralf%20Peter%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Wolfgang%22%2C%22lastName%22%3A%22Heinrich%22%7D%5D%2C%22abstractNote%22%3A%22Microwave%20and%20optical%20measurements%20are%20correlated%20to%20identify%20the%20mode%20evolution%20in%20a%20miniature%2C%20microwave%20driven%2C%20inductively%20coupled%20plasma%20%28ICP%29%20source.%20The%20very%20compact%20design%20of%20the%20source%20is%20derived%20from%20previous%20work%20%28Porteanu%20et%20al%202013%20Plasma%20Sources%20Sci.%20Technol.%2022%20035016%29.%20Microwave%20spectroscopy%20of%20the%20system%20resonances%20during%20the%20simultaneous%20microwave%20excitation%20of%20the%20plasma%20%28%5Cu2018Hot-S-Parameter%5Cu2019%20spectroscopy%29%20is%20a%20novel%20method%20to%20determine%20the%20electron%20density%20and%20to%20identify%20the%20type%20of%20coupling%20mode.%20The%20method%20corresponds%20directly%20to%20the%20kind%20of%20numerical%20simulations%20employed.%20The%20purpose%20of%20this%20analysis%20is%20%5Cufb01nally%20to%20%5Cufb01nd%20the%20minimum%20power%20necessary%20to%20drive%20the%20source%20into%20the%20ICP%20mode.%20The%20ef%5Cufb01ciency%20of%20microwave%20energy%20transfer%20to%20the%20plasma%20is%20also%20discussed.%20Nitrogen%20at%20pressures%20between%2050%20and%201000%20Pa%20and%20a%20gas%20%5Cufb02ow%20of%20150%20sccm%20is%20used%20as%20test%20plasma%2C%20for%20which%20the%20electron%20density%20is%20determined.%20Analysis%20of%20the%20microwave%20resonance%20frequency%20shows%20that%20the%20electron%20density%20exceeds%201019%20m%5Cu22123%20at%2050%20Pa%20for%2011%20W%20and%20at%201000%20Pa%20for%2026%20W%20absorbed%20power.%203D%20theoretical%20analysis%20of%20this%20source%20con%5Cufb01rms%20that%20at%20this%20electron%20density%20an%20ICP%20mode%20is%20present.%22%2C%22date%22%3A%222019-03-15%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fab06a7%22%2C%22ISSN%22%3A%221361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fab06a7%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-19T14%3A23%3A24Z%22%7D%7D%2C%7B%22key%22%3A%22S8KGFFZP%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Stefanovi%5Cu0107%20et%20al.%22%2C%22parsedDate%22%3A%222018-12-21%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%3Cdiv%20class%3D%5C%22csl-bib-body%5C%22%20style%3D%5C%22line-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%5C%22%3E%5Cn%20%20%3Cdiv%20class%3D%5C%22csl-entry%5C%22%3EStefanovi%26%23x107%3B%2C%20I.%2C%20Bibinov%2C%20N.%2C%20Porteanu%2C%20H.-E.%2C%20Klute%2C%20M.%2C%20Brinkmann%2C%20R.-P.%2C%20%26amp%3B%20Awakowicz%2C%20P.%20%282018%29.%20Optical%20characterization%20of%20a%20novel%20miniature%20microwave%20inductively%20coupled%20plasma%20source%20in%20nitrogen%20flow.%20%3Ci%3EPlasma%20Sources%20Science%20and%20Technology%3C%5C%2Fi%3E%2C%20%3Ci%3E27%3C%5C%2Fi%3E%2812%29%2C%2012LT01.%20%3Ca%20href%3D%27https%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Faaefcc%27%3Ehttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Faaefcc%3C%5C%2Fa%3E%20%3Ca%20title%3D%27Cite%20in%20RIS%20Format%27%20class%3D%27zp-CiteRIS%27%20href%3D%27https%3A%5C%2F%5C%2Fwww.aept.ruhr-uni-bochum.de%5C%2Fwp-content%5C%2Fplugins%5C%2Fzotpress%5C%2Flib%5C%2Frequest%5C%2Frequest.cite.php%3Fapi_user_id%3D2825793%26amp%3Bitem_key%3DS8KGFFZP%27%3ECite%3C%5C%2Fa%3E%20%3C%5C%2Fdiv%3E%5Cn%3C%5C%2Fdiv%3E%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Optical%20characterization%20of%20a%20novel%20miniature%20microwave%20inductively%20coupled%20plasma%20source%20in%20nitrogen%20flow%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ilija%22%2C%22lastName%22%3A%22Stefanovi%5Cu0107%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Nikita%22%2C%22lastName%22%3A%22Bibinov%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Horia-Eugen%22%2C%22lastName%22%3A%22Porteanu%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Michael%22%2C%22lastName%22%3A%22Klute%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ralf-Peter%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%5D%2C%22abstractNote%22%3A%22%22%2C%22date%22%3A%222018-12-21%22%2C%22language%22%3A%22en%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Faaefcc%22%2C%22ISSN%22%3A%221361-6595%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Faaefcc%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-19T14%3A25%3A34Z%22%7D%7D%5D%7D
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