Dr.-Ing. Birk Berger

Neuroth, C., Mujahid, Z., Berger, B., Oberste-Beulmann, C., Oppotsch, T., Zhang, Q.-Z., Muhler, M., Mussenbrock, T., Korolov, I., & Schulze, J. (2023). The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges. Plasma Sources Science and Technology, 32(10), 105019. https://doi.org/10.1088/1361-6595/ad0323 Cite

Eremin, D., Engel, D., Krüger, D., Wilczek, S., Berger, B., Oberberg, M., Wölfel, C., Smolyakov, A., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode. Plasma Sources Science and Technology, 32(4), 045007. https://doi.org/10.1088/1361-6595/acc481 Cite

Eremin, D., Berger, B., Engel, D., Kallähn, J., Köhn, K., Krüger, D., Xu, L., Oberberg, M., Wölfel, C., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code. Plasma Sources Science and Technology, 32(4), 045008. https://doi.org/10.1088/1361-6595/acc47f Cite

Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., Brinkmann, R. P., & Schulze, J. (2023). Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results. Plasma Sources Science and Technology, 32(4), 045009. https://doi.org/10.1088/1361-6595/acc480 Cite

Roggendorf, J., Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., & Schulze, J. (2022). Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes. Plasma Sources Science and Technology, 31(6), 065007. https://doi.org/10.1088/1361-6595/ac7413 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control, 16, 100142. https://doi.org/10.1016/j.ifacsc.2021.100142 Cite

Liu, Y., Trieschmann, J., Berger, B., Schulze, J., & Mussenbrock, T. (2021). Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field. Physics of Plasmas, 28(5), 053505. https://doi.org/10.1063/5.0045947 Cite

Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite

Oberberg, M., Berger, B., Buschheuer, M., Engel, D., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2020). The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O ₂. Plasma Sources Science and Technology, 29(7), 075013. https://doi.org/10.1088/1361-6595/ab9b31 Cite

Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite

Oberberg, M., Engel, D., Berger, B., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2019). Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge. Plasma Sources Science and Technology, 28(11), 115021. https://doi.org/10.1088/1361-6595/ab53a0 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Awakowicz, P., Lunze, J., & Schulze, J. (2019). The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition. Journal of Instrumentation, 14(10), P10007–P10007. https://doi.org/10.1088/1748-0221/14/10/P10007 Cite

Brandt, S., Berger, B., Donkó, Z., Derzsi, A., Schüngel, E., Koepke, M., & Schulze, J. (2019). Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF ₄. Plasma Sources Science and Technology, 28(9), 095021. https://doi.org/10.1088/1361-6595/ab3c7c Cite

Daksha, M., Derzsi, A., Zaka-ul-Islam, M., Schulenberg, D., Berger, B., Donkó, Z., & Schulze, J. (2019). Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas. Plasma Sources Science and Technology, 28(3), 034002. https://doi.org/10.1088/1361-6595/ab094f Cite

Berger, B., You, K., Lee, H.-C., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2018). Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas. Plasma Sources Science and Technology, 27(12), 12LT02. https://doi.org/10.1088/1361-6595/aaefc7 Cite

Donkó, Z., Derzsi, A., Korolov, I., Hartmann, P., Brandt, S., Schulze, J., Berger, B., Koepke, M., Bruneau, B., Johnson, E., Lafleur, T., Booth, J.-P., Gibson, A. R., O’Connell, D., & Gans, T. (2018). Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. Plasma Physics and Controlled Fusion, 60(1), 014010. https://doi.org/10.1088/1361-6587/aa8378 Cite

Berger, B., SteinBerger, T., Schüngel, E., Koepke, M., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2017). Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase. Applied Physics Letters, 111(20), 201601. https://doi.org/10.1063/1.5000144 Cite

Brandt, S., Berger, B., Schüngel, E., Korolov, I., Derzsi, A., Bruneau, B., Johnson, E., Lafleur, T., O’Connell, D., Koepke, M., Gans, T., Booth, J.-P., Donkó, Z., & Schulze, J. (2016). Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF ₄. Plasma Sources Science and Technology, 25(4), 045015. https://doi.org/10.1088/0963-0252/25/4/045015 Cite

Daksha, M., Berger, B., Schuengel, E., Korolov, I., Derzsi, A., Koepke, M., Donkó, Z., & Schulze, J. (2016). A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas. Journal of Physics D: Applied Physics, 49(23), 234001. https://doi.org/10.1088/0022-3727/49/23/234001 Cite

Berger, B., Brandt, S., Franek, J., Schüngel, E., Koepke, M., Mussenbrock, T., & Schulze, J. (2015). Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms. Journal of Applied Physics, 118(22), 223302. https://doi.org/10.1063/1.4937403 Cite

Franek, J., Brandt, S., Berger, B., Liese, M., Barthel, M., Schüngel, E., & Schulze, J. (2015). Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms. Review of Scientific Instruments, 86(5), 053504. https://doi.org/10.1063/1.4921399 Cite