course: Technische Hochfrequenzplasmen

number:
141366
teaching methods:
lecture with tutorials
media:
computer based presentation, black board and chalk
responsible person:
Prof. Dr.-Ing. Peter Awakowicz
Lecturers:
Dr. Julian Schulze (ETIT), M. Sc. Birk-Sören Berger (ETIT), M. Sc. Moritz Oberberg (ETIT), M. Sc. Stefan Ries (ETIT)
language:
german
HWS:
4
CP:
5
offered in:
summer term

dates in summer term

  • start: Tuesday the 02.04.2019
  • lecture Tuesdays: from 10:15 to 11.45 o'clock in ID 03/401
  • tutorial Wednesdays: from 12:15 to 13.45 o'clock in ID 03/401

Exam

Date according to prior agreement with lecturer.

Form of exam:oral
Registration for exam:FlexNow
Duration:30min

goals

The students are proficient in the theoretical basics required for the description of particle transport, sheaths, heating mechanisms, and equilibrium concepts in high frequency technological plasmas. They are familiar with selected plasma diagnostics and simulation techniques. They know different types of technological high frequency plasmas such as capacitive and inductive radio frequency discharges and understand their modes of operation as well as industrial applications.

content

  • Introduction
  • Basics
  • Transport
  • Sheath models
  • Heating mechanisms
  • Equilibrium concepts
  • Selected diagnostics and simulation techniques
  • Capacitive Radio Frequency Plasmas
  • Inductive Radio Frequency Plasmas
  • Applications

requirements

keine

recommended knowledge

Mathematics 1, 2, 3 General Electrical Engineering 1, 2, 3, 4 Elektrophysics Plasmatechnology 1

materials

script:

presentation slides:

tutorials:

miscellaneous:

literature

  1. Braithwaite, Nick, Chabert, Pascal "Physics of Radio-Frequency Plasmas", Cambridge University Press, 2011
  2. Lichtenberg, Allan J., Lieberman, Michael A. "Principles of Plasma Discharges and Materials Processing", Wiley-Interscience, 1994